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Faculty of Scien... [1]
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XU QINGSONG [1]
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Journal article [1]
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2012 [1]
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英語English [1]
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Design and development of a flexure-based dual-stage nanopositioning system with minimum interference behavior
Journal article
Xu Q.. Design and development of a flexure-based dual-stage nanopositioning system with minimum interference behavior[J]. IEEE Transactions on Automation Science and Engineering, 2012, 9(3), 554.
Authors:
Xu Q.
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TC[WOS]:
98
TC[Scopus]:
110
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Submit date：2018/10/30
Decoupling Design
Dual-servo System (Dss)
Flexure Mechanisms
Micro-/nanopositioning
Motion Control
