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Effect of deposition temperature on the structural and surface properties of AlN by plasma enhanced atomic layer deposition Journal article
Chen F., Fang X., Wang S., Niu S., Fang F., Fang D., Tang J., Wang X., Liu G., Wei Z.. Effect of deposition temperature on the structural and surface properties of AlN by plasma enhanced atomic layer deposition[J]. Hongwai yu Jiguang Gongcheng/Infrared and Laser Engineering, 2016, 45(4).
Authors:  Chen F.;  Fang X.;  Wang S.;  Niu S.;  Fang F.; et al.
Favorite | TC[Scopus]:0 | Submit date：2019/04/08
Aluminum Nitride  Crystallization  Deposition Temperature  Growth Rate  Plasma Enhanced Atomic Layer Deposition  Surface Roughness  
Rapid deposition of buffer layers for YBCO coated conductors on biaxially-textured ni tapes Journal article
Wang Y., Liu L., Liu H., Song X., Hong D., Xu D., Zhu S., Li Y.. Rapid deposition of buffer layers for YBCO coated conductors on biaxially-textured ni tapes[J]. Journal of Superconductivity and Novel Magnetism, 2011, 24(7), 2085-2089.
Authors:  Wang Y.;  Liu L.;  Liu H.;  Song X.;  Hong D.; et al.
Favorite | TC[WOS]:0 TC[Scopus]:0 | Submit date：2019/01/16
Buffer Layers  Coated Conductors  Deposition Rate  Epitaxial Growth  Pulsed Laser Deposition