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VAI MANG I [1]
PUN SIO HANG [1]
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2022 [1]
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Fabrication of CMUTs Using Sacrificial Release Process with Ashing Assisted Polysilicon Release
Conference paper
Che, U. Kin, Liu, Xin, Yu, Yuanyu, Wang, Jiujiang, Pun, Sio Hang, Chen, Fei, Mak, Peng Un, Vai, Mang I.. Fabrication of CMUTs Using Sacrificial Release Process with Ashing Assisted Polysilicon Release[C]. El-Hashash A.:SPIE, 2022, 1245807.
Authors:
Che, U. Kin
;
Liu, Xin
;
Yu, Yuanyu
;
Wang, Jiujiang
;
Pun, Sio Hang
; et al.
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Submit date：2023/01/30
Ashing
Capacitive Micromachined Ultrasonic Transducer
Polysilicon
Sacrificial Layer Release
Stress
