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2021 [1]
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Design and experiment of capacitive micromachined ultrasonic transducer array for high-frequency underwater imaging
Journal article
Yu, Yuanyu, Wang, Jiujiang, Liu, Xin, Pun, Sio H., Qiu, Weibao, Zhang, Shuang, Cheng, Ching H., Lei, Kin F., Vai, Mang I., Mak, Peng U.. Design and experiment of capacitive micromachined ultrasonic transducer array for high-frequency underwater imaging[J]. Recent Advances in Electrical and Electronic Engineering, 2021, 14(2), 233-240.
Authors:
Yu, Yuanyu
;
Wang, Jiujiang
;
Liu, Xin
;
Pun, Sio H.
;
Qiu, Weibao
; et al.
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Submit date:2022/05/13
Capacitive Micromachined Ultrasonic Transducer
Capacitive Micromachined Ultrasonic Transducer (Cmut)
Device Design
Sacrificial Release Process
Underwater Imaging
Zirconate Titanate