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MAK PENG UN [1]
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1997 [1]
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The design and application of electron cyclotron resonance discharges
Journal article
Asmussen Jr. J., Grotjohn T.A., Mak P., Perrin M.A.. The design and application of electron cyclotron resonance discharges[J]. IEEE Transactions on Plasma Science, 1997, 25(6), 1196-1221.
Authors:
Asmussen Jr. J.
;
Grotjohn T.A.
;
Mak P.
;
Perrin M.A.
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Submit date：2019/03/01
Ecr Microwave Discharges
High-density Plasma Sources
Plasma Processing
