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Control the shape of buckling micromachined beam using plasma chemistry bonding technology Journal article
Su W.S., Lee S.T., Lin C.Y., Yip M.C., Tsai M.S., Fang W.. Control the shape of buckling micromachined beam using plasma chemistry bonding technology[J]. Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, 2006, 45(10 B), 8479-8483.
Authors:  Su W.S.;  Lee S.T.;  Lin C.Y.;  Yip M.C.;  Tsai M.S.; et al.
Favorite | TC[WOS]:5 TC[Scopus]:6 | Submit date：2019/04/08
Buckle  Mems  Micro Bridge  Plasma Treatment  Residual Stress