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Effect of target current on microstructure, color and properties of titanium nitride/titanium carbonitride films via mid-frequency magnetron sputtering Journal article
Kong, Jing, Huang, Shiqi, Guo, Xingang, Chen, Dexin, Shen, Gengzhe, Chen, Zhengjian, Qian, Jin, Liang, Yining, Kang, Zhixin, Lo, Kin Ho, Kwok, Chi Tat. Effect of target current on microstructure, color and properties of titanium nitride/titanium carbonitride films via mid-frequency magnetron sputtering[J]. Materials Chemistry and Physics, 2025, 333, 130375.
Authors:  Kong, Jing;  Huang, Shiqi;  Guo, Xingang;  Chen, Dexin;  Shen, Gengzhe; et al.
Favorite | TC[WOS]:0 TC[Scopus]:0  IF:4.3/4.1 | Submit date：2025/01/22
Magnetron Sputtering  Tin/ticn Thin Films  L∗a∗b∗ Color  Nanomechanical Properties  Corrosion