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The design and application of electron cyclotron resonance discharges Journal article
Asmussen Jr. J., Grotjohn T.A., Mak P., Perrin M.A.. The design and application of electron cyclotron resonance discharges[J]. IEEE Transactions on Plasma Science, 1997, 25(6), 1196-1221.
Authors:  Asmussen Jr. J.;  Grotjohn T.A.;  Mak P.;  Perrin M.A.
Favorite | TC[WOS]:47 TC[Scopus]:58 | Submit date：2019/03/01
Ecr Microwave Discharges  High-density Plasma Sources  Plasma Processing  
Study of the Electron Gas Behavior in an ECR Multipolar Plasma Source Conference paper
P. Mak, W. Tan, F.C. Sze, T.A. Grotjohn, J. Asmussen. Study of the Electron Gas Behavior in an ECR Multipolar Plasma Source[C], 1992.
Authors:  P. Mak;  W. Tan;  F.C. Sze;  T.A. Grotjohn;  J. Asmussen
Favorite | TC[Scopus]:0 | Submit date：2019/03/21
Ion and neutral energies in a multipolar electron cyclotron resonance plasma source Journal article
King G., Sze F.C., Mak P., Grotjohn T.A., Asmussen J.. Ion and neutral energies in a multipolar electron cyclotron resonance plasma source[J]. Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, 1992, 10(4), 1265-1269.
Authors:  King G.;  Sze F.C.;  Mak P.;  Grotjohn T.A.;  Asmussen J.
Favorite | TC[WOS]:35 TC[Scopus]:29 | Submit date：2019/03/01
Investigation of the influence of electromagnetic excitation on electron cyclotron resonance discharge properties Conference paper
Mak P., King G., Grotjohn T.A., Asmussen J.. Investigation of the influence of electromagnetic excitation on electron cyclotron resonance discharge properties[C], 1992, 1281-1287.
Authors:  Mak P.;  King G.;  Grotjohn T.A.;  Asmussen J.
Favorite | TC[WOS]:22 TC[Scopus]:19 | Submit date：2019/03/01