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Novel Area-Changed Capacitive Methods for Simultaneous Displacement Transducing and Force Balance in a Nano-g MEMS Accelerometer Journal article
Li, Fangzheng, Liu, Dandan, Gao, Le, Cai, Bingyang, Yang, Lujia, Wang, Yuan, Zhao, Chun, Wu, Wenjie, Tu, Liangcheng. Novel Area-Changed Capacitive Methods for Simultaneous Displacement Transducing and Force Balance in a Nano-g MEMS Accelerometer[J]. Journal of Microelectromechanical Systems, 2024, 33(1), 12-20.
Authors:  Li, Fangzheng;  Liu, Dandan;  Gao, Le;  Cai, Bingyang;  Yang, Lujia; et al.
Favorite | TC[WOS]:0 TC[Scopus]:0  IF:2.5/2.6 | Submit date：2024/02/22
Area-changed Capacitor  Electrostatic Actuator  Force-balance  Low Noise  Mems Accelerometer