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Journal article [1]
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2007 [1]
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英語English [1]
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Weixi Jiagong Ji... [1]
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Preparation of silicon nanopillars array using gold nanoparticles as etching mask
Journal article
Zhao B.-J., Wang Y., Zhang Y.-F.. Preparation of silicon nanopillars array using gold nanoparticles as etching mask[J]. Weixi Jiagong Jishu/Microfabrication Technology, 2007(1).
Authors:
Zhao B.-J.
;
Wang Y.
;
Zhang Y.-F.
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Submit date：2019/01/16
Gold nanoparticle
Nanopillar array
Reactive ion etching
Self-assembly
