English | 繁體

Search in the results

UM

Browse/Search Results:  1-1 of 1 Help

Selected(0)Clear Items/Page:    Sort:
A novel SOI Z-axis accelerometer with gap closing differential sensing electrodes Conference paper
Hsu C.-P., Yip M.-C., Fang W.. A novel SOI Z-axis accelerometer with gap closing differential sensing electrodes[C], 2009, 1154-1157.
Authors:  Hsu C.-P.;  Yip M.-C.;  Fang W.
Favorite | TC[Scopus]:4 | Submit date：2019/04/08
Accelerometer  Gap Closing  Soi