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XU QINGSONG [1]
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Conference paper [1]
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2016 [1]
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英語English [1]
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Design and Anlysis of an In-Plane Flexure XYZ Micro/Nano-Positioning Stage
Conference paper
Zhang, X., Xu, Q.. Design and Anlysis of an In-Plane Flexure XYZ Micro/Nano-Positioning Stage[C]:IEEE, 2016, 359-363.
Authors:
Zhang, X.
;
Xu, Q.
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Submit date：2022/08/15
Micro/Nano-Positioning
mechanism design
xyz stage
