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XU QINGSONG [1]
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2019 [1]
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英語English [1]
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2018 IEEE Intern... [1]
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Design of a Novel Piezo-Driven XYZ Compliant Parallel Micro/Nano-Positioning Stage
Conference paper
Zeyi Wu, Qingsong Xu. Design of a Novel Piezo-Driven XYZ Compliant Parallel Micro/Nano-Positioning Stage[C], 2019.
Authors:
Zeyi Wu
;
Qingsong Xu
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Submit date：2019/04/23
Micro-/nano-positioning
Compliant Mechanism
Piezoelectric Actuator
Parallel Kinematics
Mechanism Design
