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Conference paper [1]
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2008 [1]
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英語English [1]
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2008 IEEE/LEOS I... [1]
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The two-axis magnetostatic-drive single-crystal-si micro scanner driven by back-side electroplating Ni film
Conference paper
Hsu C.-P., Chen W.-C., Tang T.-L., Yip M.-C., Fang W.. The two-axis magnetostatic-drive single-crystal-si micro scanner driven by back-side electroplating Ni film[C], 2008, 152-153.
Authors:
Hsu C.-P.
;
Chen W.-C.
;
Tang T.-L.
;
Yip M.-C.
;
Fang W.
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Submit date：2019/04/08
