This paper presents a low-power and area efficient 10-bit successive approximation register (SAR) analog-to-digital (ADC) with a hybrid capacitive-MOS consisting of a 7-bit MSB capacitive DAC (CDAC) and a 3-bit LSB MOS DAC (MDAC), which consumes less power and much smaller chip area than a pure CDAC. Instead of using a string of eight MOS transistors to control one unit capacitor, the 3-bit LSB MDAC is realized by a MOS string with four native MOS transistors to control two unit capacitors, which allows higher voltage drop and more reliable operation for each unit MOS. The overall energy consumption of the proposed CAP-MOS DAC is reduced by 56.2% compared to a Vcm-based 10-bit pure CDAC with the same unit capacitance. Under the sampling rate of 200 kS/s, the prototype 10-bit SAR ADC implemented in a 0.18-μm CMOS technology achieves a signal-to-noise-and-distortion ratio / spurious-free dynamic range of 56.91 /68.56 dB at 99-kHz input under a 0.6-V power-supply, while consumes 1.76 μW at 200 kS/s for a figure of merit of 15.38 fJ/step. The peak DNL and INL are +0.27/-0.21 LSB and +0.43/-0.45 LSB, respectively. The ADC occupies a small active area of 0.097 mm.