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Design of a compact compliant constant-force XY precision positioning stage
Piyu Wang; Qingsong Xu
2016-10-10
Conference Name2016 12th IEEE/ASME International Conference on Mechatronic and Embedded Systems and Applications (MESA)
Source PublicationMESA 2016 - 12th IEEE/ASME International Conference on Mechatronic and Embedded Systems and Applications - Conference Proceedings
Conference Date29-31 Aug. 2016
Conference PlaceAuckland, New Zealand
Abstract

This paper presents the design of a compact flexure-based parallel-kinematics precision positioning stage with constant force output. The stage mechanism is devised using multistage compound parallelogram flexures (MCPFs) to achieve decoupled and positive-stiffness structures. Bistable beams are used to design negative-stiffness structure. Four bistable beams and six MCPFs are combined together as a zero-stiffness structure in each working direction. A complete elliptic integral model of the zero-stiffness structure is established and verified by using finite element analysis (FEA) simulation. The structure parameters are carefully designed to guarantee the requirement on motion range, stiffness, resonant frequency, and payload capabilities. The parametric design is verified by conducting FEA simulation, which reveals a reachable constant-force motion range about 700 μm in each working axis with good performance in other aspects.

KeywordBistable Beams Compliant Mechanisms Constant Force Flexure Hinges Micro-/nanopositioning
DOI10.1109/MESA.2016.7587107
URLView the original
Indexed ByCPCI-S
Language英語English
WOS Research AreaAutomation & Control Systems ; Computer Science ; Engineering
WOS SubjectAutomation & Control Systems ; Computer Science, Artificial Intelligence ; Engineering, Electrical & Electronic
WOS IDWOS:000387154700015
Scopus ID2-s2.0-84994247298
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Document TypeConference paper
CollectionDEPARTMENT OF ELECTROMECHANICAL ENGINEERING
Corresponding AuthorQingsong Xu
AffiliationDepartment of Electromechanical Engineering, Faculty of Science and Technology University of Macau
First Author AffilicationFaculty of Science and Technology
Corresponding Author AffilicationFaculty of Science and Technology
Recommended Citation
GB/T 7714
Piyu Wang,Qingsong Xu. Design of a compact compliant constant-force XY precision positioning stage[C], 2016.
APA Piyu Wang., & Qingsong Xu (2016). Design of a compact compliant constant-force XY precision positioning stage. MESA 2016 - 12th IEEE/ASME International Conference on Mechatronic and Embedded Systems and Applications - Conference Proceedings.
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