Preparation of porous silicon microreactor components integrated with microheater and noble metal catalyst

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Status	已發表Published
	Preparation of porous silicon microreactor components integrated with microheater and noble metal catalyst
	Chang Y.; Su X.; Ma C.; Wang C.
	2008-02-01
Source Publication	Huagong Xuebao/Journal of Chemical Industry and Engineering (China)
ISSN	04381157
Volume	59 Issue:2 Pages:354-358
Abstract	A porous silicon (PS) template with porous size of φ3 μm × 2 μm and total volume of 0.0224 mm fabricated by anodizing p-Si (100) in HF bath was reported. The seed layer catalysts of Ag, Au, Pd and Pt were formed by immersing deposition on PS in the metal ion solutions. A Ni positive template with thickness of 15 μm was deposited electrolessly, and increased to 200 μm by electroplating. Then Ni positive template was peeled off from PS by ultrasonic after dipping in 10% HF solution for 10 min. Morphology study showed that the seed layers deposited preferentially on borders than in pores of PS and the PS maintained its shape, which could be used to fabricate microreactor with catalytic function. The interface between Ni template and PS presented many orbicular island grains and could be used to fabricate microheater. The results show that this process is a simple, inexpensive technology and can be used to fabricate microreactor combined with microheater.
Keyword	Distributed production Electroless deposition Electroplating Microheater Microreactor Monocrystal silicon Porous silicon
URL	View the original
Language	英語English
Fulltext Access	View Full-Text via Scopus
Document Type	Journal article
Collection	University of Macau
Affiliation	Lanzhou University
Recommended Citation GB/T 7714	Chang Y.,Su X.,Ma C.,et al. Preparation of porous silicon microreactor components integrated with microheater and noble metal catalyst[J]. Huagong Xuebao/Journal of Chemical Industry and Engineering (China), 2008, 59(2), 354-358.
APA	Chang Y.., Su X.., Ma C.., & Wang C. (2008). Preparation of porous silicon microreactor components integrated with microheater and noble metal catalyst. Huagong Xuebao/Journal of Chemical Industry and Engineering (China), 59(2), 354-358.
MLA	Chang Y.,et al."Preparation of porous silicon microreactor components integrated with microheater and noble metal catalyst".Huagong Xuebao/Journal of Chemical Industry and Engineering (China) 59.2(2008):354-358.

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