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Design of flexure-based modular architecture micro-positioning stage
Ding,Bingxiao1; Yang,Zhixin2; Li,Yangmin3
2020-09-01
Source PublicationMicrosystem Technologies
ISSN0946-7076
Volume26Issue:9Pages:2893-2901
Abstract

As the current trend in numerous industrial domains is to miniaturise products, micro-positioning stage(MPS) capable of performing micro-manipulation and micro-assembly tasks with sub-micrometer or nanometer precision is playing an increasing important role in these fields. In addition, well performances and low cost are two emergency issues need to be addressed for widely using flexure-based MPSs. However, the design and fabrication process for MPSs at present are costly both in time and money. Especially, the designed configurations are tailored to a specific application without flexibility. Thus, the purpose of this paper is to introduce a design of precision flexure-based reconfigurable MPSs which provide better flexibility and functionality and allows to reduce the time to market significantly. To begin with, performance requirements and benefits for reconfigurable MPSs are introduced. Then, some typical modules and their functions are introduced in detail. Finally, some selective stages assembled with function modules are proposed as case studies, for the purpose of validating the benefits of reconfigurable MPSs.

DOI10.1007/s00542-020-04830-9
URLView the original
Indexed BySCIE
Language英語English
WOS Research AreaEngineering ; Science & Technology - Other Topics ; Materials Science ; Physics
WOS SubjectEngineering, Electrical & Electronic ; Nanoscience & Nanotechnology ; Materials Science, Multidisciplinary ; Physics, Applied
WOS IDWOS:000526184600001
PublisherSPRINGER HEIDELBERGTIERGARTENSTRASSE 17, D-69121 HEIDELBERG, GERMANY
Scopus ID2-s2.0-85083787722
Fulltext Access
Citation statistics
Document TypeJournal article
CollectionFaculty of Science and Technology
THE STATE KEY LABORATORY OF INTERNET OF THINGS FOR SMART CITY (UNIVERSITY OF MACAU)
DEPARTMENT OF ELECTROMECHANICAL ENGINEERING
Corresponding AuthorLi,Yangmin
Affiliation1.School of Physics and Electromechanical Engineering,Jishou University,Jishou,416000,China
2.State Key Laboratory of Internet of Things for Smart City and Department of Electromechanical Engineering,Faculty of Science and Technology,University of Macau,Taipa,999078,Macao
3.Department of Industrial and Systems Engineering,The Hong Kong Polytechnic University,999077,Hong Kong
Recommended Citation
GB/T 7714
Ding,Bingxiao,Yang,Zhixin,Li,Yangmin. Design of flexure-based modular architecture micro-positioning stage[J]. Microsystem Technologies, 2020, 26(9), 2893-2901.
APA Ding,Bingxiao., Yang,Zhixin., & Li,Yangmin (2020). Design of flexure-based modular architecture micro-positioning stage. Microsystem Technologies, 26(9), 2893-2901.
MLA Ding,Bingxiao,et al."Design of flexure-based modular architecture micro-positioning stage".Microsystem Technologies 26.9(2020):2893-2901.
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