Residential College | false |
Status | 已發表Published |
Survey on recent designs of compliant micro-/nano-positioning stages | |
Zeyi Wu; Qingsong Xu | |
2018-02-11 | |
Source Publication | Actuators |
ISSN | 2076-0825 |
Volume | 7Issue:1 |
Abstract | Micromanipulation is a hot topic due to its enabling role in various research fields. In order to perform a high precision operation at a small scale, compliant mechanisms have been proposed and applied for decades. In microscale manipulation, micro-/nano-positioning is the most fundamental operation because a precision positioning is the premise of subsequent operations. This paper is concentrated on reviewing the state-of-the-art research on complaint micro-/nano-positioning stage design in recent years. It involves the major processes and components for designing a compliant positioning stage, e.g., actuator selection, stroke amplifier design, connecting scheme of the multi-DOF stage and structure optimization. The review provides a reference to design a compliant micro-/nano-positioning stage for pertinent applications. |
Keyword | Compliant Mechanisms Micro-/nano-manipulation Positioning Structure Optimization |
DOI | 10.3390/act7010005 |
URL | View the original |
Indexed By | SCIE |
WOS Research Area | Engineering ; Instruments & Instrumentation |
WOS Subject | Engineering, Mechanical ; Instruments & Instrumentation |
WOS ID | WOS:000428504700004 |
Scopus ID | 2-s2.0-85041916626 |
Fulltext Access | |
Citation statistics | |
Document Type | Journal article |
Collection | DEPARTMENT OF ELECTROMECHANICAL ENGINEERING |
Corresponding Author | Qingsong Xu |
Affiliation | Department of Electromechanical Engineering,Faculty of Science and Technology,University of Macau,Taipa, Macau,Avenida da Universidade,999078,Macao |
First Author Affilication | Faculty of Science and Technology |
Corresponding Author Affilication | Faculty of Science and Technology |
Recommended Citation GB/T 7714 | Zeyi Wu,Qingsong Xu. Survey on recent designs of compliant micro-/nano-positioning stages[J]. Actuators, 2018, 7(1). |
APA | Zeyi Wu., & Qingsong Xu (2018). Survey on recent designs of compliant micro-/nano-positioning stages. Actuators, 7(1). |
MLA | Zeyi Wu,et al."Survey on recent designs of compliant micro-/nano-positioning stages".Actuators 7.1(2018). |
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