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Survey on recent designs of compliant micro-/nano-positioning stages
Zeyi Wu; Qingsong Xu
2018-02-11
Source PublicationActuators
ISSN2076-0825
Volume7Issue:1
Abstract

Micromanipulation is a hot topic due to its enabling role in various research fields. In order to perform a high precision operation at a small scale, compliant mechanisms have been proposed and applied for decades. In microscale manipulation, micro-/nano-positioning is the most fundamental operation because a precision positioning is the premise of subsequent operations. This paper is concentrated on reviewing the state-of-the-art research on complaint micro-/nano-positioning stage design in recent years. It involves the major processes and components for designing a compliant positioning stage, e.g., actuator selection, stroke amplifier design, connecting scheme of the multi-DOF stage and structure optimization. The review provides a reference to design a compliant micro-/nano-positioning stage for pertinent applications.

KeywordCompliant Mechanisms Micro-/nano-manipulation Positioning Structure Optimization
DOI10.3390/act7010005
URLView the original
Indexed BySCIE
WOS Research AreaEngineering ; Instruments & Instrumentation
WOS SubjectEngineering, Mechanical ; Instruments & Instrumentation
WOS IDWOS:000428504700004
Scopus ID2-s2.0-85041916626
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Document TypeJournal article
CollectionDEPARTMENT OF ELECTROMECHANICAL ENGINEERING
Corresponding AuthorQingsong Xu
AffiliationDepartment of Electromechanical Engineering,Faculty of Science and Technology,University of Macau,Taipa, Macau,Avenida da Universidade,999078,Macao
First Author AffilicationFaculty of Science and Technology
Corresponding Author AffilicationFaculty of Science and Technology
Recommended Citation
GB/T 7714
Zeyi Wu,Qingsong Xu. Survey on recent designs of compliant micro-/nano-positioning stages[J]. Actuators, 2018, 7(1).
APA Zeyi Wu., & Qingsong Xu (2018). Survey on recent designs of compliant micro-/nano-positioning stages. Actuators, 7(1).
MLA Zeyi Wu,et al."Survey on recent designs of compliant micro-/nano-positioning stages".Actuators 7.1(2018).
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