Residential College | false |
Status | 已發表Published |
Optimal design, fabrication, and control of an XY micropositioning stage driven by electromagnetic actuators | |
Shunli Xiao1; Yangmin Li1,2 | |
2013 | |
Source Publication | IEEE Transactions on Industrial Electronics |
ISSN | 0278-0046 |
Volume | 60Issue:10Pages:4613-4626 |
Abstract | This paper presents the optimal design, fabrication, and control of a novel compliant flexure-based totally decoupled XY micropositioning stage driven by electromagnetic actuators. The stage is constructed with a simple structure by employing double four-bar parallelogram flexures and four noncontact types of electromagnetic actuators to realize the kinematic decoupling and force decoupling, respectively. The kinematics and dynamics modeling of the stage are conducted by resorting to compliance and stiffness analysis based on matrix method, and the parameters are obtained by multiobjective genetic algorithm (GA) optimization method. The analytical models for electromagnetic forces are also established, and both mechanical structure and electromagnetic models are validated by finite-element analysis via ANSYS software. It is found that the system is with hysteresis and nonlinear characteristics when a preliminary open-loop test is conducted; thereafter, a simple PID controller is applied. Therefore, an inverse Preisach model-based feedforward sliding-mode controller is exploited to control the micromanipulator system. Experiments show that the moving range can achieve 1 mm × 1 mm and the resolution can reach ± 0.4μm. Moreover, the designed micromanipulator can bear a heavy load because of its optimal mechanical structure. |
Keyword | Electromagnetic Actuators Hysteresis Micro-/nanopositioning Sliding-mode Control |
DOI | 10.1109/TIE.2012.2209613 |
URL | View the original |
Indexed By | SCIE |
Language | 英語English |
WOS Research Area | Automation & Control Systems ; Engineering ; Instruments & Instrumentation |
WOS Subject | Automation & Control Systems ; Engineering, Electrical & Electronic ; Instruments & Instrumentation |
WOS ID | WOS:000319353300044 |
Publisher | IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC445 HOES LANE, PISCATAWAY, NJ 08855-4141 |
The Source to Article | Scopus |
Scopus ID | 2-s2.0-84878158539 |
Fulltext Access | |
Citation statistics | |
Document Type | Journal article |
Collection | University of Macau |
Corresponding Author | Shunli Xiao |
Affiliation | 1.Department of Electromechanical Engineering, Faculty of Science and Technology, University of Macau, Taipa, Macao, China 2.Tianjin Key Laboratory for Control Theory and Applications in Complicated Systems, Tianjin University of Technology, Tianjin, China |
First Author Affilication | Faculty of Science and Technology |
Corresponding Author Affilication | Faculty of Science and Technology |
Recommended Citation GB/T 7714 | Shunli Xiao,Yangmin Li. Optimal design, fabrication, and control of an XY micropositioning stage driven by electromagnetic actuators[J]. IEEE Transactions on Industrial Electronics, 2013, 60(10), 4613-4626. |
APA | Shunli Xiao., & Yangmin Li (2013). Optimal design, fabrication, and control of an XY micropositioning stage driven by electromagnetic actuators. IEEE Transactions on Industrial Electronics, 60(10), 4613-4626. |
MLA | Shunli Xiao,et al."Optimal design, fabrication, and control of an XY micropositioning stage driven by electromagnetic actuators".IEEE Transactions on Industrial Electronics 60.10(2013):4613-4626. |
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