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Optimal design, fabrication, and control of an XY micropositioning stage driven by electromagnetic actuators
Shunli Xiao1; Yangmin Li1,2
2013
Source PublicationIEEE Transactions on Industrial Electronics
ISSN0278-0046
Volume60Issue:10Pages:4613-4626
Abstract

This paper presents the optimal design, fabrication, and control of a novel compliant flexure-based totally decoupled XY micropositioning stage driven by electromagnetic actuators. The stage is constructed with a simple structure by employing double four-bar parallelogram flexures and four noncontact types of electromagnetic actuators to realize the kinematic decoupling and force decoupling, respectively. The kinematics and dynamics modeling of the stage are conducted by resorting to compliance and stiffness analysis based on matrix method, and the parameters are obtained by multiobjective genetic algorithm (GA) optimization method. The analytical models for electromagnetic forces are also established, and both mechanical structure and electromagnetic models are validated by finite-element analysis via ANSYS software. It is found that the system is with hysteresis and nonlinear characteristics when a preliminary open-loop test is conducted; thereafter, a simple PID controller is applied. Therefore, an inverse Preisach model-based feedforward sliding-mode controller is exploited to control the micromanipulator system. Experiments show that the moving range can achieve 1 mm × 1 mm and the resolution can reach ± 0.4μm. Moreover, the designed micromanipulator can bear a heavy load because of its optimal mechanical structure.

KeywordElectromagnetic Actuators Hysteresis Micro-/nanopositioning Sliding-mode Control
DOI10.1109/TIE.2012.2209613
URLView the original
Indexed BySCIE
Language英語English
WOS Research AreaAutomation & Control Systems ; Engineering ; Instruments & Instrumentation
WOS SubjectAutomation & Control Systems ; Engineering, Electrical & Electronic ; Instruments & Instrumentation
WOS IDWOS:000319353300044
PublisherIEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC445 HOES LANE, PISCATAWAY, NJ 08855-4141
The Source to ArticleScopus
Scopus ID2-s2.0-84878158539
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Citation statistics
Document TypeJournal article
CollectionUniversity of Macau
Corresponding AuthorShunli Xiao
Affiliation1.Department of Electromechanical Engineering, Faculty of Science and Technology, University of Macau, Taipa, Macao, China
2.Tianjin Key Laboratory for Control Theory and Applications in Complicated Systems, Tianjin University of Technology, Tianjin, China
First Author AffilicationFaculty of Science and Technology
Corresponding Author AffilicationFaculty of Science and Technology
Recommended Citation
GB/T 7714
Shunli Xiao,Yangmin Li. Optimal design, fabrication, and control of an XY micropositioning stage driven by electromagnetic actuators[J]. IEEE Transactions on Industrial Electronics, 2013, 60(10), 4613-4626.
APA Shunli Xiao., & Yangmin Li (2013). Optimal design, fabrication, and control of an XY micropositioning stage driven by electromagnetic actuators. IEEE Transactions on Industrial Electronics, 60(10), 4613-4626.
MLA Shunli Xiao,et al."Optimal design, fabrication, and control of an XY micropositioning stage driven by electromagnetic actuators".IEEE Transactions on Industrial Electronics 60.10(2013):4613-4626.
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