Residential College | false |
Status | 已發表Published |
Design of a Compact 1-DOF Piezo-Driven Flexure Stage for Vertical Micro/Nano- Positioning | |
Zeyi Wu; Qingsong Xu | |
2019-07 | |
Conference Name | 2018 IEEE 8th Annual International Conference on CYBER Technology in Automation, Control, and Intelligent Systems (CYBER) |
Source Publication | 8th Annual IEEE International Conference on Cyber Technology in Automation, Control and Intelligent Systems, CYBER 2018 |
Pages | 208-213 |
Conference Date | 19-23 July 2018 |
Conference Place | Tianjin, China |
Country | China |
Publication Place | IEEE, 345 E 47TH ST, NEW YORK, NY 10017 USA |
Publisher | IEEE |
Abstract | This paper presents the design of a new compact 1- DOF compliant stage driven by a piezoelectric actuator (PEA) for micro/nano-positioning in vertical direction. In order to fulfill the design requirement and to improve the compactness and output directionality of the stage, a series of design processes are presented. In particular, an orthogonal compound bridge-type (OCBT) amplifier is introduced to amplify the displacement of the PEA. It can significantly reduce the height of the stage, leading to a compact design. The design variables are determined by analyzing the mechanism. These design variables are optimized by multi-objective genetic algorithm (MOGA) based on finite-element analysis (FEA). The optimal design results in the stage dimension of 58×20×15.5 mm3. Performance evaluation is conducted by FEA analysis. Results show that the 1-DOF stage is able to provide a maximum displacement of 181.18 μm, which is more than 12 times the input displacement of PEA. Payload testing results indicate the stage can support a maximum load of about 80 N. |
DOI | 10.1109/CYBER.2018.8688098 |
URL | View the original |
Indexed By | CPCI-S |
Language | 英語English |
WOS Research Area | Automation & Control Systems ; Computer Science |
WOS Subject | Automation & Control Systems ; Computer Science, Artificial Intelligence ; Computer Science, Cybernetics |
WOS ID | WOS:000468941800037 |
Scopus ID | 2-s2.0-85064989836 |
Fulltext Access | |
Citation statistics | |
Document Type | Conference paper |
Collection | DEPARTMENT OF ELECTROMECHANICAL ENGINEERING |
Corresponding Author | Qingsong Xu |
Affiliation | Department of Electromechanical Engineering, Faculty of Science and Technology, University of Macau, Avenida da Universidade, Taipa, Macau, China |
First Author Affilication | Faculty of Science and Technology |
Corresponding Author Affilication | Faculty of Science and Technology |
Recommended Citation GB/T 7714 | Zeyi Wu,Qingsong Xu. Design of a Compact 1-DOF Piezo-Driven Flexure Stage for Vertical Micro/Nano- Positioning[C], IEEE, 345 E 47TH ST, NEW YORK, NY 10017 USA:IEEE, 2019, 208-213. |
APA | Zeyi Wu., & Qingsong Xu (2019). Design of a Compact 1-DOF Piezo-Driven Flexure Stage for Vertical Micro/Nano- Positioning. 8th Annual IEEE International Conference on Cyber Technology in Automation, Control and Intelligent Systems, CYBER 2018, 208-213. |
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