UM  > Faculty of Science and Technology  > DEPARTMENT OF ELECTROMECHANICAL ENGINEERING
Residential Collegefalse
Status已發表Published
Design of a Compact 1-DOF Piezo-Driven Flexure Stage for Vertical Micro/Nano- Positioning
Zeyi Wu; Qingsong Xu
2019-07
Conference Name2018 IEEE 8th Annual International Conference on CYBER Technology in Automation, Control, and Intelligent Systems (CYBER)
Source Publication8th Annual IEEE International Conference on Cyber Technology in Automation, Control and Intelligent Systems, CYBER 2018
Pages208-213
Conference Date19-23 July 2018
Conference PlaceTianjin, China
CountryChina
Publication PlaceIEEE, 345 E 47TH ST, NEW YORK, NY 10017 USA
PublisherIEEE
Abstract

This paper presents the design of a new compact 1- DOF compliant stage driven by a piezoelectric actuator (PEA) for micro/nano-positioning in vertical direction. In order to fulfill the design requirement and to improve the compactness and output directionality of the stage, a series of design processes are presented. In particular, an orthogonal compound bridge-type (OCBT) amplifier is introduced to amplify the displacement of the PEA. It can significantly reduce the height of the stage, leading to a compact design. The design variables are determined by analyzing the mechanism. These design variables are optimized by multi-objective genetic algorithm (MOGA) based on finite-element analysis (FEA). The optimal design results in the stage dimension of 58×20×15.5 mm3. Performance evaluation is conducted by FEA analysis. Results show that the 1-DOF stage is able to provide a maximum displacement of 181.18 μm, which is more than 12 times the input displacement of PEA. Payload testing results indicate the stage can support a maximum load of about 80 N.

DOI10.1109/CYBER.2018.8688098
URLView the original
Indexed ByCPCI-S
Language英語English
WOS Research AreaAutomation & Control Systems ; Computer Science
WOS SubjectAutomation & Control Systems ; Computer Science, Artificial Intelligence ; Computer Science, Cybernetics
WOS IDWOS:000468941800037
Scopus ID2-s2.0-85064989836
Fulltext Access
Citation statistics
Document TypeConference paper
CollectionDEPARTMENT OF ELECTROMECHANICAL ENGINEERING
Corresponding AuthorQingsong Xu
AffiliationDepartment of Electromechanical Engineering, Faculty of Science and Technology, University of Macau, Avenida da Universidade, Taipa, Macau, China
First Author AffilicationFaculty of Science and Technology
Corresponding Author AffilicationFaculty of Science and Technology
Recommended Citation
GB/T 7714
Zeyi Wu,Qingsong Xu. Design of a Compact 1-DOF Piezo-Driven Flexure Stage for Vertical Micro/Nano- Positioning[C], IEEE, 345 E 47TH ST, NEW YORK, NY 10017 USA:IEEE, 2019, 208-213.
APA Zeyi Wu., & Qingsong Xu (2019). Design of a Compact 1-DOF Piezo-Driven Flexure Stage for Vertical Micro/Nano- Positioning. 8th Annual IEEE International Conference on Cyber Technology in Automation, Control and Intelligent Systems, CYBER 2018, 208-213.
Files in This Item:
There are no files associated with this item.
Related Services
Recommend this item
Bookmark
Usage statistics
Export to Endnote
Google Scholar
Similar articles in Google Scholar
[Zeyi Wu]'s Articles
[Qingsong Xu]'s Articles
Baidu academic
Similar articles in Baidu academic
[Zeyi Wu]'s Articles
[Qingsong Xu]'s Articles
Bing Scholar
Similar articles in Bing Scholar
[Zeyi Wu]'s Articles
[Qingsong Xu]'s Articles
Terms of Use
No data!
Social Bookmark/Share
All comments (0)
No comment.
 

Items in the repository are protected by copyright, with all rights reserved, unless otherwise indicated.