| Residential College | false |
| Status | 已發表Published |
| Decoupled Z-axis microgyroscope using oblique comb for frequency tuning | |
| Hsu C.-P.; Tsai D.-H.; Yip M.-C.; Fang W. | |
| 2007-12-01 | |
| Conference Name | 6th IEEE Sensors Conference |
| Source Publication | Proceedings of IEEE Sensors
 |
| Pages | 800-803 |
| Conference Date | OCT 28-31, 2007 |
| Conference Place | Atlanta, GA |
| Abstract | This paper presents a novel decoupled microgyroscope. The oblique comb electrode within the device has the ability to tune the frequency of the sensing mode. The simulation results show that the driving mode and the sensing mode are well decoupled. The measurement results show that with the dc voltage of 21V, the sensing mode frequency can be tuned about 51Hz. © 2007 IEEE. |
| DOI | 10.1109/ICSENS.2007.4388521 |
| URL | View the original |
| Language | 英語English |
| WOS ID | WOS:000254563600203 |
| Scopus ID | 2-s2.0-48349094947 |
| Fulltext Access | |
| Citation statistics | |
| Document Type | Conference paper |
| Collection | University of Macau |
| Affiliation | National Tsing Hua University |
| Recommended Citation GB/T 7714 | Hsu C.-P.,Tsai D.-H.,Yip M.-C.,et al. Decoupled Z-axis microgyroscope using oblique comb for frequency tuning[C], 2007, 800-803. |
| APA | Hsu C.-P.., Tsai D.-H.., Yip M.-C.., & Fang W. (2007). Decoupled Z-axis microgyroscope using oblique comb for frequency tuning. Proceedings of IEEE Sensors, 800-803. |
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