Growth and dielectric properties of Pb(ScTa)1-xTi xO3 (PSTT) thin films by MOCVD method

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	Growth and dielectric properties of Pb(ScTa)1-xTi xO3 (PSTT) thin films by MOCVD method
	Lin C.-H.2; Friddle P.A.2; Ma C.-H.2; Chen H.1
	2002-03-01
Source Publication	Tamkang Journal of Science and Engineering
ISSN	15606686
Volume	5 Issue:1 Pages:1-6
Abstract	Highly (002) textured Pb(ScTa)TiO (PSTT) (with composition x = 0 - 0.3) thin films were deposited using metal-organic chemical vapor deposition (MOCVD) technique at temperature ranging from 600°C to 685°C. Dielectric properties of these PSTT thin films showed strong dependency on the growth temperature and PT content. Ti addition acted as a "Curie" temperature shifter, moving T from -10 to 120°C with the dielectric constant peak value increasing from 1397 to 1992 (measured at 1 kHz) when composition x went from 0 to 0.3. Loss tangent values were generally below 0.025. For PSTT thin films with composition near its morphotropic boundary (x = 0.3), the room temperature dielectric constants increased from 980 to around 1600 as the growth temperature increased from 650 to 685°C. In addition, the dielectric dispersion behaviors of films grown at different temperatures were compared.
Keyword	Dielectric Properties MOCVD PSTT Relaxor Ferroelectric Thin Films
URL	View the original
Language	英語English
Fulltext Access	View Full-Text via Scopus
Document Type	Journal article
Collection	University of Macau
Affiliation	1.City University of Hong Kong 2.University of Illinois at Urbana-Champaign
Recommended Citation GB/T 7714	Lin C.-H.,Friddle P.A.,Ma C.-H.,et al. Growth and dielectric properties of Pb(ScTa)1-xTi xO3 (PSTT) thin films by MOCVD method[J]. Tamkang Journal of Science and Engineering, 2002, 5(1), 1-6.
APA	Lin C.-H.., Friddle P.A.., Ma C.-H.., & Chen H. (2002). Growth and dielectric properties of Pb(ScTa)1-xTi xO3 (PSTT) thin films by MOCVD method. Tamkang Journal of Science and Engineering, 5(1), 1-6.
MLA	Lin C.-H.,et al."Growth and dielectric properties of Pb(ScTa)1-xTi xO3 (PSTT) thin films by MOCVD method".Tamkang Journal of Science and Engineering 5.1(2002):1-6.

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