BiLaTiO (BLT) thin films were grown on Pt/Ti/SiO/Si and LNO/Pt/Ti/SiO/Si substrates using sol-gel processing. Scanning electron micrographs and X-ray diffraction showed uniform surfaces composed of rod-like grains deposited on the Pt/Ti/SiO/Si substrates and large planar grain with plate-like structure and having the c-axis preferred orientation deposited on the LNO/Pt/Ti/SiO/Si substrates. The BLT thin films deposition on LNO/Pt/Ti/SiO/Si substrates show good polarization-voltage (P-E), capacitance-voltage (C-V). More importantly, the BLT thin films derived on LNO/Pt/Ti/SiO/Si show little change at various cycling fields and cycling frequencies both in the switching polarization (P) and in the non-switching polarization (P) up to 2×10 switching cycles. © 2004 Elsevier B.V. All rights reserved.