| Residential College | false |
| Status | 已發表Published |
| Synthesis and thermal stability of nanocomposite nc-TiN/a-TiB2 thin films | |
| Lu Y.H.; Zhou Z.F.; Sit P.; Shen Y.G.; Li K.Y.; Chen H. | |
| 2005-06-01 | |
| Source Publication | Acta Metallurgica Sinica (English Letters)
 |
| ISSN | 10067191 |
| Volume | 18Issue:3Pages:307-312 |
| Abstract | Several nc-TiN/a-TiB thin films comprised of nanocrystalline (nc-) TiN and amorphous (a-) TiB phases were deposited on Si(100) at room temperature by reactive unbalanced dc magnetron sputtering, followed by vacuum annealed at 400, 600, 800 and 1000°C for 1h, respectively. Effects of B content on microstructure, mechanical behaviors and thermal microstructure stability have been investigated by X-ray diffraction (XRD), scanning electron microscopy (SEM), X-ray photoelectron spectroscopy (XPS) and nanoindentation measurements. The results indicated that B addition greatly affected both microstructure and mechanical behavior of nc-TiN/a-TiB thin films. With increasing B content the grain size decreased. A maximum hardness value of about 33 GPa was obtained at B content of about 19at.%. The improved mechanical properties of nc-TiN/a-TiB films with the addition of B into TiN were attributed to their densified microstructure with development of fine grain size. Only addition of sufficient B could restrain grain growth during annealing. High B content resulted in high microstructure stability. The crystallization of amorphous matrix occurred at about 800°C, forming TiB or TiB crystallite, depending on B content. Before that no change in bonding configuration was found. |
| Keyword | Annealing Boron Nc-TiN/a-TiB2 thin film Reactive unbalanced dc magnetron sputtering Thermal stability |
| URL | View the original |
| Language | 英語English |
| Fulltext Access | |
| Document Type | Journal article |
| Collection | University of Macau |
| Affiliation | City University of Hong Kong |
| Recommended Citation GB/T 7714 | Lu Y.H.,Zhou Z.F.,Sit P.,et al. Synthesis and thermal stability of nanocomposite nc-TiN/a-TiB2 thin films[J]. Acta Metallurgica Sinica (English Letters), 2005, 18(3), 307-312. |
| APA | Lu Y.H.., Zhou Z.F.., Sit P.., Shen Y.G.., Li K.Y.., & Chen H. (2005). Synthesis and thermal stability of nanocomposite nc-TiN/a-TiB2 thin films. Acta Metallurgica Sinica (English Letters), 18(3), 307-312. |
| MLA | Lu Y.H.,et al."Synthesis and thermal stability of nanocomposite nc-TiN/a-TiB2 thin films".Acta Metallurgica Sinica (English Letters) 18.3(2005):307-312. |
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