| Status | 已發表Published |
| Effects of B content on microstructure and mechanical properties of nanocomposite Ti-Bx-Ny thin films | |
| Lu Y.H.; Sit P.; Hung T.F.; Chen H.; Zhou Z.F.; Li K.Y.; Shen Y.G. | |
| 2005-12-01 | |
| Source Publication | Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
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| Volume | 23 |
| Issue | 2 |
| Pages | 449-457 |
| Abstract | Thin films of Ti- Bx - Ny were deposited on Si(100) at room temperature by reactive unbalanced dc magnetron sputtering in an Ar- N2 gas mixture. The effects of B content on microstructure and mechanical properties of these films have been analyzed using x-ray photoelectron spectroscopy, Fourier-transform infrared spectroscopy, x-ray diffraction, transmission electron microscopy, atomic force microscopy, micro-indentation measurements, and an optical interference method. Microstructure studies revealed that depending upon the amount of B addition, the films showed two- or three-phase nanocomposite structure. At B contents below about 10 at. %, the films consisted of mainly TiN bondings with a small amount of TiB and BN bondings. As the B content increased, TiB gradually transformed to Ti B2 and the films consisted of nanocrystalline (nc-) TiN embedded in an amorphous (a-) Ti B2 matrix. A maximum hardness of ∼44 GPa was observed in a film with B content of 19 at. %. The improved mechanical properties of Ti- Bx - Ny films with the addition of B into TiN were attributed to their densified microstructure with development of fine grain size and different phase combination. The reduction in grain size has also been supported by means of a Monte Carlo simulation. When B contents reached ∼42 at. % or above, an amorphous-like nanocomposite of nc-TiNa-Ti B2 a-BN was formed. The effect of thin a-Ti B2 layer in stabilizing nc-TiN structure is also elucidated and explained on the basis of structural and thermodynamic stability. © 2005 American Vacuum Society. |
| DOI | 10.1116/1.1865117 |
| URL | View the original |
| Language | 英語English |
| Fulltext Access | |
| Citation statistics | |
| Document Type | Conference paper |
| Collection | University of Macau |
| Affiliation | City University of Hong Kong |
| Recommended Citation GB/T 7714 | Lu Y.H.,Sit P.,Hung T.F.,et al. Effects of B content on microstructure and mechanical properties of nanocomposite Ti-Bx-Ny thin films[C], 2005, 449-457. |
| APA | Lu Y.H.., Sit P.., Hung T.F.., Chen H.., Zhou Z.F.., Li K.Y.., & Shen Y.G. (2005). Effects of B content on microstructure and mechanical properties of nanocomposite Ti-Bx-Ny thin films. Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, 23(2), 449-457. |
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