The compositionally graded BaSrTiO films with a fine compositional gradient from BaTiO to Ba SrTiO were fabricated on Pt/Ti/SiO/Si substrates by a sol-gel deposition method. The graded films crystallized into a pure perovskite structure after post-deposition annealing. Dielectric constant peaks, common to a ferroelectric transition, were not observed in the temperature range from -35°C to 190°C, within which the dielectric constant and dielectric loss showed negligible temperature dependence. The unproved temperature stability from this type of compositionally graded material is beneficial to applications requiring a wide range of operating temperatures, thereby eliminating the need for environmental controls.