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Nanolasers grown on silicon-based MOSFETs
Lu F.; Tran T.-T.D.; Ko W.S.; Ng K.W.; Chen R.; Chang-Hasnain C.
2012-05-21
Source PublicationOptics Express
ISSN10944087
Volume20Issue:11Pages:12171-12176
Abstract

We report novel indium gallium arsenide (InGaAs) nanopillar lasers that are monolithically grown on (100)-silicon-based functional metal-oxide- semiconductor field effect transistors (MOSFETs) at low temperature (410 °C). The MOSFETs maintain their performance after the nanopillar growth, providing a direct demonstration of complementary metal-oxide-semiconudctor (CMOS) compatibility. Room-temperature operation of optically pumped lasers is also achieved. To our knowledge, this is the first time that monolithically integrated lasers and transistors have been shown to work on the same silicon chip, serving as a proof-of-concept that such integration can be extended to more complicated CMOS integrated circuits. © 2012 Optical Society of America.

DOI10.1364/OE.20.012171
URLView the original
Language英語English
WOS IDWOS:000304403100061
Scopus ID2-s2.0-84861490504
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Citation statistics
Document TypeJournal article
CollectionUniversity of Macau
AffiliationUniversity of California, Berkeley
Recommended Citation
GB/T 7714
Lu F.,Tran T.-T.D.,Ko W.S.,et al. Nanolasers grown on silicon-based MOSFETs[J]. Optics Express, 2012, 20(11), 12171-12176.
APA Lu F.., Tran T.-T.D.., Ko W.S.., Ng K.W.., Chen R.., & Chang-Hasnain C. (2012). Nanolasers grown on silicon-based MOSFETs. Optics Express, 20(11), 12171-12176.
MLA Lu F.,et al."Nanolasers grown on silicon-based MOSFETs".Optics Express 20.11(2012):12171-12176.
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