BeZnO nanorod arrays with high crystalline quality were fabricated on Si substrate by a simple, low-cost hydrothermal method. The effect of Be-corporation on the structure, morphology and optical property of ZnO nanorod arrays was investigated. The diameter of Be ZnO nanorods gradually decreased and the length of them increased with increasing Be concentration. Edge emissions of the Be ZnO nanorods show a obvious blue shift upon the increase of the Be content. BeZnO nanorod arrays with high crystalline quality were fabricated on Si substrate. Edge emissions of the BeZnO nanorods show a obvious blue shift upon the increase of the Be content. © 2013 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.