| Residential College | false |
| Status | 已發表Published |
| Evaluation of an end excited electron cyclotron resonance plasma source | |
Mak P. ; Asmussen J.
| |
| 1994-12-01 | |
| Conference Name | 1994 IEEE 21st International Conference on Plasma Sciences (ICOPS) |
| Source Publication | IEEE International Conference on Plasma Science
 |
| Conference Date | 6-8 June 1994 |
| Conference Place | Santa Fe, NM, USA, USA |
| Abstract | In this paper, the experimental performance of several different multipolar ECR plasma source configuration will be compared using an argon gas input and measuring: 1) impressed electric field, 2) plasma source output species densities, 3) electron and ion energy distribution functions, input and pressure. Meanwhile, the evaluation of each reactor configuration will also investigate the output performance as the excitation is varied through several different electromagnetic modes. The evaluation is done by comparing output density uniformity, ion production power cost in eV/ion, microwave coupling efficiency and absorbed microwave power density in Watts/cm. |
| DOI | 10.1109/PLASMA.1994.588708 |
| URL | View the original |
| Language | 英語English |
| Scopus ID | 2-s2.0-0028729213 |
| Fulltext Access | |
| Citation statistics | |
| Document Type | Conference paper |
| Collection | DEPARTMENT OF ELECTRICAL AND COMPUTER ENGINEERING |
| Affiliation | Michigan State University |
| Recommended Citation GB/T 7714 | Mak P.,Asmussen J.. Evaluation of an end excited electron cyclotron resonance plasma source[C], 1994. |
| APA | Mak P.., & Asmussen J. (1994). Evaluation of an end excited electron cyclotron resonance plasma source. IEEE International Conference on Plasma Science. |
| Files in This Item: | There are no files associated with this item. | |||||
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