| Residential College | false |
| Status | 已發表Published |
| An accurate design to calculate and measure the capacitance of CMUT for pressure sensors | |
Wang, Jiujiang1 ; Yu, Yuanyu1; Pun, Sio Hang1 ; Gao, Yueming2; Che, U. Kin1; Mak, Peng Un1
| |
| 2016-12 | |
| Conference Name | IEEE International Conference on Consumer Electronics-China (ICCE-China) |
| Source Publication | 2016 IEEE International Conference on Consumer Electronics-China, ICCE-China 2016
 |
| Conference Date | DEC 19-21, 2016 |
| Conference Place | Guangzhou, PEOPLES R CHINA |
| Abstract | Capacitive Micromachined Ultrasonic Transducer (CMUT) is a type of micro-electro-mechanical system (MEMS) device which has the advantages such as ease of integration with front-end electronics and fabrication of uniform device arrays. The structure and fundamental working principle of a CMUT are similar to that of a parallel plate capacitor. When working in conventional mode, the deflection profiles can be described by analytical expressions and the capacitance can be calculated thereafter. A design was proposed to calculate the deflection profiles of the CMUT membrane accurately and eliminate the parasitic capacitance of the CMUT device. By appropriately selecting the dimensions of the device, the CMUT can be used as a pressure sensor. |
| Keyword | Cmut Deflection Profile Capacitance Pressure Sensor |
| DOI | 10.1109/ICCE-China.2016.7849760 |
| URL | View the original |
| Indexed By | CPCI-S |
| Language | 英語English |
| WOS Research Area | Engineering |
| WOS ID | WOS:000400497700035 |
| Scopus ID | 2-s2.0-85015157203 |
| Fulltext Access | |
| Citation statistics | |
| Document Type | Conference paper |
| Collection | INSTITUTE OF MICROELECTRONICS DEPARTMENT OF ELECTRICAL AND COMPUTER ENGINEERING |
| Affiliation | 1.Universidade de Macau 2.Key Lab of Medical Instrumentation and Pharmaceutical Technology of Fujian Province |
| First Author Affilication | University of Macau |
| Recommended Citation GB/T 7714 | Wang, Jiujiang,Yu, Yuanyu,Pun, Sio Hang,et al. An accurate design to calculate and measure the capacitance of CMUT for pressure sensors[C], 2016. |
| APA | Wang, Jiujiang., Yu, Yuanyu., Pun, Sio Hang., Gao, Yueming., Che, U. Kin., & Mak, Peng Un (2016). An accurate design to calculate and measure the capacitance of CMUT for pressure sensors. 2016 IEEE International Conference on Consumer Electronics-China, ICCE-China 2016. |
| Files in This Item: | There are no files associated with this item. | |||||
Items in the repository are protected by copyright, with all rights reserved, unless otherwise indicated.
Edit Comment