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Initial Design of the Capacitive Micromachined Ultrasonic Transducers (CMUT) with Helmholtz Resonance Aperture
Cao X.W.; Jin B.; Yu Y.Y.; Wang J.J.; Pun S.H.; Vai M.I.; Mak P.U.
2015
Conference Name1st Global Conference on Biomedical Engineering (GCBME) / 9th Asian-Pacific Conference on Medical and Biological Engineering (APCMBE)
Source PublicationIFMBE Proceedings
Volume47
Pages192-195
Conference DateOCT 09-12, 2014
Conference PlaceNatl Cheng Kung Univ, Tainan, TAIWAN
Abstract

In this paper, we have demonstrated the performance improvement of the air-borne Capacitive Micromachined Ultrasonic Transducers (CMUT) in transmit mode using the Helmholtz resonance principles. The natural frequency of the resonance cavity,and the Helmholtz resonance frequency of the aperture which is formed in the center of membrane, were matched for resonance during the design. In order to verify the theoretical concept, Finite Element Analysis (FEA) simulation was performed using COMSOL software. Through the simulation comparison with the traditional CMUT, the proposed CMUT demonstrates the feasibility to improve the output acoustic pressure and SPL of the air-borne CMUT in transmit mode by combining the mechanical resonance theory with Helmholtz resonance principle.

KeywordCapacitive Micromachined Ultrasonic Transducers (Cmut) Fea Simulation Helmholtz Resonance
DOI10.1007/978-3-319-11128-5_53
URLView the original
Indexed ByCPCI-S
Language英語English
WOS Research AreaEngineering
WOS SubjectEngineering, Biomedical
WOS IDWOS:000349915800053
Scopus ID2-s2.0-84914809821
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Cited Times [WOS]:0   [WOS Record]     [Related Records in WOS]
Document TypeConference paper
CollectionDEPARTMENT OF ELECTRICAL AND COMPUTER ENGINEERING
Corresponding AuthorCao X.W.
AffiliationUniversidade de Macau
First Author AffilicationUniversity of Macau
Corresponding Author AffilicationUniversity of Macau
Recommended Citation
GB/T 7714
Cao X.W.,Jin B.,Yu Y.Y.,et al. Initial Design of the Capacitive Micromachined Ultrasonic Transducers (CMUT) with Helmholtz Resonance Aperture[C], 2015, 192-195.
APA Cao X.W.., Jin B.., Yu Y.Y.., Wang J.J.., Pun S.H.., Vai M.I.., & Mak P.U. (2015). Initial Design of the Capacitive Micromachined Ultrasonic Transducers (CMUT) with Helmholtz Resonance Aperture. IFMBE Proceedings, 47, 192-195.
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