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A Highly Sensitive Resonant Mass Sensor Enabled by Mode-localized Sensing and Parametric Pump
Lin, Chengqi1; Chen, Jianlin1; Wang, Yuan2; Ren, Qinghua1; Ma, Yiming1; Wang, Nan1
2024
Conference Name19th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2024
Source Publication2024 IEEE 19th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2024
Conference Date2 May 2024through 5 May 2024
Conference PlaceKyoto
PublisherInstitute of Electrical and Electronics Engineers Inc.
Abstract

In this paper, a hybrid mass sensing system including a 2-DOF coupled resonator (CR) and a clamped-clamped beam (CCB) is reported, in which the frequency difference between two coupled modes of CR is identical to the resonant frequency of CCB. Therefore, the modal coupling of CR can be dynamically controlled by the resonant frequency of CCB. When a mass perturbation is introduced to CCB, the modal coupling in CR is enhanced significantly and the coupling ratio between the anti-phase and in-phase modes is investigated. The coupling ratio normalized sensitivity can be increased by two orders of magnitude compared with other amplitude modulated based resonant mass sensors, up to 4704.

DOI10.1109/NEMS60219.2024.10639844
URLView the original
Indexed ByCPCI-S
Language英語English
WOS IDWOS:001307259500021
Scopus ID2-s2.0-85203789565
Fulltext Access
Citation statistics
Document TypeConference paper
CollectionINSTITUTE OF MICROELECTRONICS
Corresponding AuthorLin, Chengqi
Affiliation1.Shanghai University, School of Microelectronics, Shanghai, China
2.University of Macau, Institute of Microelectronics, Macao
Recommended Citation
GB/T 7714
Lin, Chengqi,Chen, Jianlin,Wang, Yuan,et al. A Highly Sensitive Resonant Mass Sensor Enabled by Mode-localized Sensing and Parametric Pump[C]:Institute of Electrical and Electronics Engineers Inc., 2024.
APA Lin, Chengqi., Chen, Jianlin., Wang, Yuan., Ren, Qinghua., Ma, Yiming., & Wang, Nan (2024). A Highly Sensitive Resonant Mass Sensor Enabled by Mode-localized Sensing and Parametric Pump. 2024 IEEE 19th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2024.
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