Residential College | false |
Status | 即將出版Forthcoming |
A Highly Sensitive Resonant Mass Sensor Enabled by Mode-localized Sensing and Parametric Pump | |
Lin, Chengqi1; Chen, Jianlin1; Wang, Yuan2; Ren, Qinghua1; Ma, Yiming1; Wang, Nan1 | |
2024 | |
Conference Name | 19th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2024 |
Source Publication | 2024 IEEE 19th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2024 |
Conference Date | 2 May 2024through 5 May 2024 |
Conference Place | Kyoto |
Publisher | Institute of Electrical and Electronics Engineers Inc. |
Abstract | In this paper, a hybrid mass sensing system including a 2-DOF coupled resonator (CR) and a clamped-clamped beam (CCB) is reported, in which the frequency difference between two coupled modes of CR is identical to the resonant frequency of CCB. Therefore, the modal coupling of CR can be dynamically controlled by the resonant frequency of CCB. When a mass perturbation is introduced to CCB, the modal coupling in CR is enhanced significantly and the coupling ratio between the anti-phase and in-phase modes is investigated. The coupling ratio normalized sensitivity can be increased by two orders of magnitude compared with other amplitude modulated based resonant mass sensors, up to 4704. |
DOI | 10.1109/NEMS60219.2024.10639844 |
URL | View the original |
Indexed By | CPCI-S |
Language | 英語English |
WOS ID | WOS:001307259500021 |
Scopus ID | 2-s2.0-85203789565 |
Fulltext Access | |
Citation statistics | |
Document Type | Conference paper |
Collection | INSTITUTE OF MICROELECTRONICS |
Corresponding Author | Lin, Chengqi |
Affiliation | 1.Shanghai University, School of Microelectronics, Shanghai, China 2.University of Macau, Institute of Microelectronics, Macao |
Recommended Citation GB/T 7714 | Lin, Chengqi,Chen, Jianlin,Wang, Yuan,et al. A Highly Sensitive Resonant Mass Sensor Enabled by Mode-localized Sensing and Parametric Pump[C]:Institute of Electrical and Electronics Engineers Inc., 2024. |
APA | Lin, Chengqi., Chen, Jianlin., Wang, Yuan., Ren, Qinghua., Ma, Yiming., & Wang, Nan (2024). A Highly Sensitive Resonant Mass Sensor Enabled by Mode-localized Sensing and Parametric Pump. 2024 IEEE 19th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2024. |
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