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A Novel 3-DoF Mode Localized BAW Resonant Mass Sensor With High Quality Factor and Resolution
Wang, Linlin1; Quan, Aojie1; Wang, Yuan2,3; Pereira Madeira, Bernardo1; Li, Chengxin1; Kraft, Michael1; Wang, Chen1; Wang, Linlin4; Quan, Aojie4; Wang, Yuan5,6; Pereira Madeira, Bernardo4; Li, Chengxin4; Kraft, Michael4; Wang, Chen4
2024-08
Source PublicationIEEE Transactions on Electron Devices
ISSN0018-9383
Volume71Issue:8Pages:4926-4931
Abstract

This article presents a mass sensor based on a 3-degree-of-freedom (DoF) mode localized piezoelectric bulk acoustic wave (BAW) resonator system operating in the contour extensional mode. It features a quality factor of ~4200 under atmospheric pressure at a resonance frequency of ~6.36 MHz. More than three orders of magnitude enhancement (~1700 times) of the normalized mass sensitivity based on the amplitude ratio (AR) change were achieved compared to that based on the frequency shift. The mass resolution thereof was obtained as 1.2 pg (for the AR change output) and 0.727 pg (for the frequency shift output), respectively. Compared with the previously reported mass sensor based on coupled BAW resonators, the presented device achieved an enhanced performance in terms of both quality factor (~2.37 times higher), stability (~100 and ~3.5 times better for the AR change and frequency shift), and mass resolution (~307 and ~2.97 times better for the AR change and frequency shift). Moreover, the stability of the 3-DoF system with the AR change output was enhanced since there was only a ~1.65-fold difference in the mass resolution in terms of the frequency shift and AR change, compared to ~170-fold in the previous study. Furthermore, the novel device operated with a Q-factor of ~305 in deionized (DI) water, demonstrating the considerable potential of such devices for future sensing applications in a liquid environment. 

Keyword3-dof Coupled Bulk Acoustic Wave (Baw) Resonators Mass Sensor Mode Localization Operation In Liquid Quality Factor
DOI10.1109/TED.2024.3405905
URLView the original
Indexed BySCIE
Language英語English
WOS Research AreaEngineering ; Physics
WOS SubjectEngineering, Electrical & Electronic ; Physics, Applied
WOS IDWOS:001248177400001
PublisherIEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC, 445 HOES LANE, PISCATAWAY, NJ 08855-4141
Scopus ID2-s2.0-85196079577
Fulltext Access
Citation statistics
Document TypeJournal article
CollectionINSTITUTE OF MICROELECTRONICS
Corresponding AuthorWang, Yuan; Wang, Chen; Wang, Yuan; Wang, Chen
Affiliation1.KU Leuven, Micro and Nano Systems (MNS), Department of Electrical Engineering ESAT, Leuven, 3001, Belgium
2.Institute of Microelectronics, University of Macau, Taipa, Macao
3.Colorado State University, Department of Physics, Fort Collins, 80523, United States
4.KU Leuven, Micro and Nano Systems (MNS), Department of Electrical Engineering ESAT, Leuven, 3001, Belgium
5.Institute of Microelectronics, University of Macau, Taipa, Macao
6.Colorado State University, Department of Physics, Fort Collins, 80523, United States
Corresponding Author AffilicationUniversity of Macau
Recommended Citation
GB/T 7714
Wang, Linlin,Quan, Aojie,Wang, Yuan,et al. A Novel 3-DoF Mode Localized BAW Resonant Mass Sensor With High Quality Factor and Resolution[J]. IEEE Transactions on Electron Devices, 2024, 71(8), 4926-4931.
APA Wang, Linlin., Quan, Aojie., Wang, Yuan., Pereira Madeira, Bernardo., Li, Chengxin., Kraft, Michael., Wang, Chen., Wang, Linlin., Quan, Aojie., Wang, Yuan., Pereira Madeira, Bernardo., Li, Chengxin., Kraft, Michael., & Wang, Chen (2024). A Novel 3-DoF Mode Localized BAW Resonant Mass Sensor With High Quality Factor and Resolution. IEEE Transactions on Electron Devices, 71(8), 4926-4931.
MLA Wang, Linlin,et al."A Novel 3-DoF Mode Localized BAW Resonant Mass Sensor With High Quality Factor and Resolution".IEEE Transactions on Electron Devices 71.8(2024):4926-4931.
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