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Monolithic Heterogeneous Integration of Si(100)/GaN CMOS Inverters and Normally-Off GaN Power Devices for High Switching Frequency and High Power Applications
Fan, Yutong1,2; Liu, Xi1,2; Zhang, Weihang1,2; Wu, Yinhe1,2; Liu, Zhihong1,2; Zhang, Chunfu1,2; Jiang, Yang3; Mak, Pui In3; Hao, Yue1,2; Zhang, Jincheng1,2
2024-07
Conference Name2024 36th International Symposium on Power Semiconductor Devices and ICs (ISPSD)
Source PublicationProceedings of the International Symposium on Power Semiconductor Devices and ICs
Pages267-270
Conference Date02-06 June 2024
Conference PlaceBremen, Germany
CountryGermany
PublisherIEEE
Abstract

In this work, we demonstrate a systematic platform consisting of Si(100)/GaN monolithic heterogeneous integration CMOS inverters and GaN power HEMTs for high switching frequency and high power applications. Si(100)/GaN monolithic integration material was fabricated by transfer printing and self-aligned etching technology. Then, monolithic heterogeneous integration inverters consist of normally-off Si(100) PMOSFETs and normally-off GaN NMOS-HEMTs, and normally-off GaN power HEMTs were fabricated simultaneously on the Si(100)/GaN integration platform. The Si(100)/GaN monolithic heterogeneous integration inverters exhibited excellent low-level noise margin (NML) of 0.47 V and high-level noise margin (NMH) of 0.45 V at a supply voltage (VDD) of 1 V. Moreover, a high peak voltage gain of 30.81 V/V was attained. The decent characteristics of a ION/IOFF exceeding 109, a threshold voltage (VTH) of 2.7 V, and a breakdown voltage (VBR) of 2109 V leading to a power-figures-of-merit (PFOM) of 1.45 GW cm2 were achieved in the monolithic integrated normally-off GaN power HEMTs with a LGDof 19.5 μm. These excellent results demonstrate a promising potential of the Si(100)/GaN monolithic heterogeneous integration devices for high switching frequency and logic integrated circuit applications.

KeywordBreakdown Voltage Cmos Gan Inverter Logic Integrated Circuit Monolithic Integration Mosfet Si
DOI10.1109/ISPSD59661.2024.10579677
URLView the original
Language英語English
Scopus ID2-s2.0-85199138829
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Citation statistics
Document TypeConference paper
CollectionTHE STATE KEY LABORATORY OF ANALOG AND MIXED-SIGNAL VLSI (UNIVERSITY OF MACAU)
INSTITUTE OF MICROELECTRONICS
DEPARTMENT OF ELECTRICAL AND COMPUTER ENGINEERING
Corresponding AuthorZhang, Weihang; Zhang, Jincheng
Affiliation1.Xidian University, National Key Laboratory of Wide Bandgap Semiconductor Devices and Integrated Technology, Xi'an, 710071, China
2.Guangzhou Wide Bandgap Semiconductor Innovation Center, Guangzhou institute of technology, Xidian University, Guangzhou, 510555, China
3.University of Macau, State Key Laboratory of Analog and Mixed-Signal VLSI, Macao
Recommended Citation
GB/T 7714
Fan, Yutong,Liu, Xi,Zhang, Weihang,et al. Monolithic Heterogeneous Integration of Si(100)/GaN CMOS Inverters and Normally-Off GaN Power Devices for High Switching Frequency and High Power Applications[C]:IEEE, 2024, 267-270.
APA Fan, Yutong., Liu, Xi., Zhang, Weihang., Wu, Yinhe., Liu, Zhihong., Zhang, Chunfu., Jiang, Yang., Mak, Pui In., Hao, Yue., & Zhang, Jincheng (2024). Monolithic Heterogeneous Integration of Si(100)/GaN CMOS Inverters and Normally-Off GaN Power Devices for High Switching Frequency and High Power Applications. Proceedings of the International Symposium on Power Semiconductor Devices and ICs, 267-270.
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