Residential College | false |
Status | 已發表Published |
Improving the Dynamic Range and Resolution of Mems Resonant Sensors Utilizing Nonlinear Cancellation | |
Li, Chengxin1; Quan, Aojie1; Zhang, Hemin2; Wang, Chen1; Torunbalci, Mustafa Mert3; Wang, Linlin1; Wang, Chenxi1; Guan, Yangyang1; Wang, Yuan4; Kraft, Michael1 | |
2023 | |
Conference Name | 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023 |
Source Publication | 2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023 |
Pages | 469-472 |
Conference Date | 25 June 2023through 29 June 2023 |
Conference Place | Kyoto |
Abstract | In this paper, improvements on the dynamic range and resolution of MEMS (Micro-electromechanical systems) resonant sensors are demonstrated using a nonlinear cancellation method. The fabricated MEMS resonator shows obvious mechanical nonlinear behavior due to spring hardening. A DC tuning voltage forces the device to enter an intermediate regime between the mechanical and electrostatic nonlinear regimes, resulting in a higher linear vibration amplitude compared to the maximum linear amplitude (MLA), i.e., critical amplitude. The experimental results show that the input referred resolution can be improved by a factor of 7 and the dynamic range is enhanced by 6 dB, respectively, when nonlinear cancellation is applied. |
Keyword | Dynamic Range Intermediate Regime Nonlinear Behavior Nonlinear Cancellation Resonant Sensor |
URL | View the original |
Language | 英語English |
Scopus ID | 2-s2.0-85193538347 |
Fulltext Access | |
Citation statistics | |
Document Type | Conference paper |
Collection | INSTITUTE OF MICROELECTRONICS |
Affiliation | 1.Ku Leuven, Department Of Electrical Engineering (ESAT-MNS), Leuven, Belgium 2.Northwestern Polytechnical University, Moe Key Laboratory Of Micro And Nano Systems For Aerospace, Xi'an, 710072, China 3.Broadcom, San Jose, United States 4.University Of Macau, Institute Of Microelectronics, Macau, Macao |
Recommended Citation GB/T 7714 | Li, Chengxin,Quan, Aojie,Zhang, Hemin,et al. Improving the Dynamic Range and Resolution of Mems Resonant Sensors Utilizing Nonlinear Cancellation[C], 2023, 469-472. |
APA | Li, Chengxin., Quan, Aojie., Zhang, Hemin., Wang, Chen., Torunbalci, Mustafa Mert., Wang, Linlin., Wang, Chenxi., Guan, Yangyang., Wang, Yuan., & Kraft, Michael (2023). Improving the Dynamic Range and Resolution of Mems Resonant Sensors Utilizing Nonlinear Cancellation. 2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023, 469-472. |
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