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Improving the Dynamic Range and Resolution of Mems Resonant Sensors Utilizing Nonlinear Cancellation
Li, Chengxin1; Quan, Aojie1; Zhang, Hemin2; Wang, Chen1; Torunbalci, Mustafa Mert3; Wang, Linlin1; Wang, Chenxi1; Guan, Yangyang1; Wang, Yuan4; Kraft, Michael1
2023
Conference Name22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023
Source Publication2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023
Pages469-472
Conference Date25 June 2023through 29 June 2023
Conference PlaceKyoto
Abstract

In this paper, improvements on the dynamic range and resolution of MEMS (Micro-electromechanical systems) resonant sensors are demonstrated using a nonlinear cancellation method. The fabricated MEMS resonator shows obvious mechanical nonlinear behavior due to spring hardening. A DC tuning voltage forces the device to enter an intermediate regime between the mechanical and electrostatic nonlinear regimes, resulting in a higher linear vibration amplitude compared to the maximum linear amplitude (MLA), i.e., critical amplitude. The experimental results show that the input referred resolution can be improved by a factor of 7 and the dynamic range is enhanced by 6 dB, respectively, when nonlinear cancellation is applied.

KeywordDynamic Range Intermediate Regime Nonlinear Behavior Nonlinear Cancellation Resonant Sensor
URLView the original
Language英語English
Scopus ID2-s2.0-85193538347
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Document TypeConference paper
CollectionINSTITUTE OF MICROELECTRONICS
Affiliation1.Ku Leuven, Department Of Electrical Engineering (ESAT-MNS), Leuven, Belgium
2.Northwestern Polytechnical University, Moe Key Laboratory Of Micro And Nano Systems For Aerospace, Xi'an, 710072, China
3.Broadcom, San Jose, United States
4.University Of Macau, Institute Of Microelectronics, Macau, Macao
Recommended Citation
GB/T 7714
Li, Chengxin,Quan, Aojie,Zhang, Hemin,et al. Improving the Dynamic Range and Resolution of Mems Resonant Sensors Utilizing Nonlinear Cancellation[C], 2023, 469-472.
APA Li, Chengxin., Quan, Aojie., Zhang, Hemin., Wang, Chen., Torunbalci, Mustafa Mert., Wang, Linlin., Wang, Chenxi., Guan, Yangyang., Wang, Yuan., & Kraft, Michael (2023). Improving the Dynamic Range and Resolution of Mems Resonant Sensors Utilizing Nonlinear Cancellation. 2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023, 469-472.
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