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Gas Sensors Based on 1 & 2-Dof Piezoelectric Baw MEMS Resonators with Coated ZIF-8
Wang, Linlin1; Wang, Chen1; Tietze, Max2; Verstreken, Margot2; Madeira, Bernardo P.1; Wang, Yuan3; Chanut, Nicolas2; Wang, Chenxi1; Quan, Aojie1; Ameloot, Rob2; Kraft, Michael1
2024-04
Conference Name2024 IEEE 37TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, MEMS
Source PublicationProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Pages871-874
Conference DateJAN 21-25, 2024
Conference PlaceAustin, TX
PublisherIEEE345 E 47TH ST, NEW YORK, NY 10017 USA
Abstract

This paper studies ethanol gas sensing applications for 1 and 2-degree-of-freedom (DoF) coupled bulk acoustic wave (BAW) resonators. Zeolitic imidazolate framework-8 (ZIF-8) was coated on the backside of the resonators to adsorb and desorb ethanol molecules, thereby introducing mass changes. For the 1-DoF device, the frequency shift was tracked, similar to conventional quartz crystal microbalance (QCM) gas sensors. In contrast, for the 2-DoF device, the amplitude ratio (AR) change was chosen as the output metric with enhanced sensitivity. Compared with the state-of-the-art gas sensor based on coupled resonators, the presented devices achieved better resolution with a lower ethanol vapor concentration and yielded a higher Q factor in air.

Keyword1 And 2-dof Bulk Acoustic Wave (Baw) Resonators Ethanol Vapor Detection Gas Sensor Zeolitic Imidazolate Framework-8 (Zif-8)
DOI10.1109/MEMS58180.2024.10439589
URLView the original
Indexed ByCPCI-S
Language英語English
WOS Research AreaEngineering
WOS SubjectEngineering, Electrical & Electronic ; Engineering, Mechanical
WOS IDWOS:001174201100224
Scopus ID2-s2.0-85186701589
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Citation statistics
Document TypeConference paper
CollectionINSTITUTE OF MICROELECTRONICS
Corresponding AuthorWang, Yuan
Affiliation1.Ku Leuven, Esat, Mns, Belgium
2.Ku Leuven, Cit, CMACS, Belgium
3.University of Macau, Macao
Corresponding Author AffilicationUniversity of Macau
Recommended Citation
GB/T 7714
Wang, Linlin,Wang, Chen,Tietze, Max,et al. Gas Sensors Based on 1 & 2-Dof Piezoelectric Baw MEMS Resonators with Coated ZIF-8[C]:IEEE345 E 47TH ST, NEW YORK, NY 10017 USA, 2024, 871-874.
APA Wang, Linlin., Wang, Chen., Tietze, Max., Verstreken, Margot., Madeira, Bernardo P.., Wang, Yuan., Chanut, Nicolas., Wang, Chenxi., Quan, Aojie., Ameloot, Rob., & Kraft, Michael (2024). Gas Sensors Based on 1 & 2-Dof Piezoelectric Baw MEMS Resonators with Coated ZIF-8. Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), 871-874.
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