Residential College | false |
Status | 已發表Published |
Gas Sensors Based on 1 & 2-Dof Piezoelectric Baw MEMS Resonators with Coated ZIF-8 | |
Wang, Linlin1; Wang, Chen1; Tietze, Max2; Verstreken, Margot2; Madeira, Bernardo P.1; Wang, Yuan3; Chanut, Nicolas2; Wang, Chenxi1; Quan, Aojie1; Ameloot, Rob2; Kraft, Michael1 | |
2024-04 | |
Conference Name | 2024 IEEE 37TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, MEMS |
Source Publication | Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) |
Pages | 871-874 |
Conference Date | JAN 21-25, 2024 |
Conference Place | Austin, TX |
Publisher | IEEE345 E 47TH ST, NEW YORK, NY 10017 USA |
Abstract | This paper studies ethanol gas sensing applications for 1 and 2-degree-of-freedom (DoF) coupled bulk acoustic wave (BAW) resonators. Zeolitic imidazolate framework-8 (ZIF-8) was coated on the backside of the resonators to adsorb and desorb ethanol molecules, thereby introducing mass changes. For the 1-DoF device, the frequency shift was tracked, similar to conventional quartz crystal microbalance (QCM) gas sensors. In contrast, for the 2-DoF device, the amplitude ratio (AR) change was chosen as the output metric with enhanced sensitivity. Compared with the state-of-the-art gas sensor based on coupled resonators, the presented devices achieved better resolution with a lower ethanol vapor concentration and yielded a higher Q factor in air. |
Keyword | 1 And 2-dof Bulk Acoustic Wave (Baw) Resonators Ethanol Vapor Detection Gas Sensor Zeolitic Imidazolate Framework-8 (Zif-8) |
DOI | 10.1109/MEMS58180.2024.10439589 |
URL | View the original |
Indexed By | CPCI-S |
Language | 英語English |
WOS Research Area | Engineering |
WOS Subject | Engineering, Electrical & Electronic ; Engineering, Mechanical |
WOS ID | WOS:001174201100224 |
Scopus ID | 2-s2.0-85186701589 |
Fulltext Access | |
Citation statistics | |
Document Type | Conference paper |
Collection | INSTITUTE OF MICROELECTRONICS |
Corresponding Author | Wang, Yuan |
Affiliation | 1.Ku Leuven, Esat, Mns, Belgium 2.Ku Leuven, Cit, CMACS, Belgium 3.University of Macau, Macao |
Corresponding Author Affilication | University of Macau |
Recommended Citation GB/T 7714 | Wang, Linlin,Wang, Chen,Tietze, Max,et al. Gas Sensors Based on 1 & 2-Dof Piezoelectric Baw MEMS Resonators with Coated ZIF-8[C]:IEEE345 E 47TH ST, NEW YORK, NY 10017 USA, 2024, 871-874. |
APA | Wang, Linlin., Wang, Chen., Tietze, Max., Verstreken, Margot., Madeira, Bernardo P.., Wang, Yuan., Chanut, Nicolas., Wang, Chenxi., Quan, Aojie., Ameloot, Rob., & Kraft, Michael (2024). Gas Sensors Based on 1 & 2-Dof Piezoelectric Baw MEMS Resonators with Coated ZIF-8. Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), 871-874. |
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