Residential College | false |
Status | 已發表Published |
Frequency-Comb-like Behavior in a Resonant MEMS Accelerometer Subject to Blue Sideband Excitation | |
Xi, Jingqian1; Xu, Jiao1; Zhang, Ziqian1; Uka, Erion3; Liu, Huafeng1; Chen, Jianlin5; Wang, Chen4; Kraft, Michael4; Mak, Pui In2; Wang, Yuan2; Zhao, Chun3 | |
2024 | |
Conference Name | 2024 IEEE INTERNATIONAL SYMPOSIUM ON INERTIAL SENSORS AND SYSTEMS, INERTIAL |
Source Publication | INERTIAL 2024 - 11th IEEE International Symposium on Inertial Sensors and Systems, Proceedings |
Conference Date | MAR 25-28, 2024 |
Conference Place | Hiroshima |
Country | JAPAN |
Publisher | IEEE, 345 E 47TH ST, NEW YORK, NY 10017 USA |
Abstract | This work reports an intriguing phenomenon discovered when subjecting a differential resonant MEMS accelerometer to blue sideband excitation (BSE). The exhibited behavior is similar to that of phononic frequency combs (PFCs). The experimental data presents a PFC-like spectrum response, with a collection of equidistant fingers when employing BSE. The spacing of the fingers in the induced frequency comb are unaffected by variations in the BSE parameters (i.e., BSE frequency and BSE amplitude), as well as the equivalent input acceleration. On the other hand, the amplitudes of the frequency comb spectral lines are dependent on the BSE signal parameters, and the equivalent acceleration perturbation. This points to a potential sensing scheme which exploits the amplitude changes of the induced frequency combs-which differs from conventional frequency combs that utilize changes in frequency spacing. The underlying mechanism that governs this phenomenon is the subject of ongoing research. This distinctive behavior, which is induced by employing a relatively unexplored operating scheme, is expected to compete with classical amplitude-modulation-based (AM) resonant sensors. |
Keyword | Blue-sideband Excitation Modal Coupling Phononic Frequency Comb Resonant Mems Accelerometer |
DOI | 10.1109/INERTIAL60399.2024.10502039 |
URL | View the original |
Indexed By | CPCI-S |
Language | 英語English |
WOS Research Area | Engineering ; Instruments & Instrumentation |
WOS Subject | Engineering, Electrical & Electronic ; Instruments & Instrumentation |
WOS ID | WOS:001215068500005 |
Scopus ID | 2-s2.0-85191967525 |
Fulltext Access | |
Citation statistics | |
Document Type | Conference paper |
Collection | DEPARTMENT OF ELECTRICAL AND COMPUTER ENGINEERING INSTITUTE OF MICROELECTRONICS |
Affiliation | 1.Huazhong University of Science and Technology, MOE Key Laboratory of Fundamental Physical Quantities Measurement, PGMF and School of Physics, Wuhan, 430074, China 2.Institute of Microelectronics, University of Macau, Macao 3.University of York, School of Physics, Engineering and Technology, YO10 5DD, United Kingdom 4.University of Leuven, ESAT Department, MNS, Belgium 5.School of Microelectronics, Shanghai University, China |
Recommended Citation GB/T 7714 | Xi, Jingqian,Xu, Jiao,Zhang, Ziqian,et al. Frequency-Comb-like Behavior in a Resonant MEMS Accelerometer Subject to Blue Sideband Excitation[C]:IEEE, 345 E 47TH ST, NEW YORK, NY 10017 USA, 2024. |
APA | Xi, Jingqian., Xu, Jiao., Zhang, Ziqian., Uka, Erion., Liu, Huafeng., Chen, Jianlin., Wang, Chen., Kraft, Michael., Mak, Pui In., Wang, Yuan., & Zhao, Chun (2024). Frequency-Comb-like Behavior in a Resonant MEMS Accelerometer Subject to Blue Sideband Excitation. INERTIAL 2024 - 11th IEEE International Symposium on Inertial Sensors and Systems, Proceedings. |
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