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Frequency-Comb-like Behavior in a Resonant MEMS Accelerometer Subject to Blue Sideband Excitation
Xi, Jingqian1; Xu, Jiao1; Zhang, Ziqian1; Uka, Erion3; Liu, Huafeng1; Chen, Jianlin5; Wang, Chen4; Kraft, Michael4; Mak, Pui In2; Wang, Yuan2; Zhao, Chun3
2024
Conference Name2024 IEEE INTERNATIONAL SYMPOSIUM ON INERTIAL SENSORS AND SYSTEMS, INERTIAL
Source PublicationINERTIAL 2024 - 11th IEEE International Symposium on Inertial Sensors and Systems, Proceedings
Conference DateMAR 25-28, 2024
Conference PlaceHiroshima
CountryJAPAN
PublisherIEEE, 345 E 47TH ST, NEW YORK, NY 10017 USA
Abstract

This work reports an intriguing phenomenon discovered when subjecting a differential resonant MEMS accelerometer to blue sideband excitation (BSE). The exhibited behavior is similar to that of phononic frequency combs (PFCs). The experimental data presents a PFC-like spectrum response, with a collection of equidistant fingers when employing BSE. The spacing of the fingers in the induced frequency comb are unaffected by variations in the BSE parameters (i.e., BSE frequency and BSE amplitude), as well as the equivalent input acceleration. On the other hand, the amplitudes of the frequency comb spectral lines are dependent on the BSE signal parameters, and the equivalent acceleration perturbation. This points to a potential sensing scheme which exploits the amplitude changes of the induced frequency combs-which differs from conventional frequency combs that utilize changes in frequency spacing. The underlying mechanism that governs this phenomenon is the subject of ongoing research. This distinctive behavior, which is induced by employing a relatively unexplored operating scheme, is expected to compete with classical amplitude-modulation-based (AM) resonant sensors.

KeywordBlue-sideband Excitation Modal Coupling Phononic Frequency Comb Resonant Mems Accelerometer
DOI10.1109/INERTIAL60399.2024.10502039
URLView the original
Indexed ByCPCI-S
Language英語English
WOS Research AreaEngineering ; Instruments & Instrumentation
WOS SubjectEngineering, Electrical & Electronic ; Instruments & Instrumentation
WOS IDWOS:001215068500005
Scopus ID2-s2.0-85191967525
Fulltext Access
Citation statistics
Document TypeConference paper
CollectionDEPARTMENT OF ELECTRICAL AND COMPUTER ENGINEERING
INSTITUTE OF MICROELECTRONICS
Affiliation1.Huazhong University of Science and Technology, MOE Key Laboratory of Fundamental Physical Quantities Measurement, PGMF and School of Physics, Wuhan, 430074, China
2.Institute of Microelectronics, University of Macau, Macao
3.University of York, School of Physics, Engineering and Technology, YO10 5DD, United Kingdom
4.University of Leuven, ESAT Department, MNS, Belgium
5.School of Microelectronics, Shanghai University, China
Recommended Citation
GB/T 7714
Xi, Jingqian,Xu, Jiao,Zhang, Ziqian,et al. Frequency-Comb-like Behavior in a Resonant MEMS Accelerometer Subject to Blue Sideband Excitation[C]:IEEE, 345 E 47TH ST, NEW YORK, NY 10017 USA, 2024.
APA Xi, Jingqian., Xu, Jiao., Zhang, Ziqian., Uka, Erion., Liu, Huafeng., Chen, Jianlin., Wang, Chen., Kraft, Michael., Mak, Pui In., Wang, Yuan., & Zhao, Chun (2024). Frequency-Comb-like Behavior in a Resonant MEMS Accelerometer Subject to Blue Sideband Excitation. INERTIAL 2024 - 11th IEEE International Symposium on Inertial Sensors and Systems, Proceedings.
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