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Micro-Electro-Mechanical Systems Microphones: A Brief Review Emphasizing Recent Advances in Audible Spectrum Applications
Zheng, Zhuoyue1; Wang, Chen2; Wang, Linlin2; Ji, Zeyu1; Song, Xiaoxiao3; Mak, Pui In1; Liu, Huafeng4; Wang, Yuan1
Source PublicationMicromachines
ISSN2072-666X
2024-02-29
Abstract

The MEMS microphone is a representative device among the MEMS family, which has attracted substantial research interest, and those tailored for human voice have earned distinct success in commercialization. Although sustained development persists, challenges such as residual stress, environmental noise, and structural innovation are posed. To collect and summarize the recent advances in this subject, this paper presents a concise review concerning the transduction mechanism, diverse mechanical structure topologies, and effective methods of noise reduction for high-performance MEMS microphones with a dynamic range akin to the audible spectrum, aiming to provide a comprehensive and adequate analysis of this scope.

KeywordCapacitive Microphone Directional Microphone Environmental Noise-cancelling Mems Microphone Piezoelectric Microphone
Language英語English
DOI10.3390/mi15030352
URLView the original
Volume15
Issue3
Pages352
WOS IDWOS:001192768400001
WOS SubjectChemistry, Analytical ; Nanoscience & Nanotechnology ; Instruments & Instrumentation ; Physics, Applied
WOS Research AreaChemistry ; Science & Technology - Other Topics ; Instruments & Instrumentation ; Physics
Indexed BySCIE
Scopus ID2-s2.0-85189144322
Fulltext Access
Citation statistics
Document TypeReview article
CollectionTHE STATE KEY LABORATORY OF ANALOG AND MIXED-SIGNAL VLSI (UNIVERSITY OF MACAU)
Faculty of Science and Technology
INSTITUTE OF MICROELECTRONICS
DEPARTMENT OF ELECTRICAL AND COMPUTER ENGINEERING
Corresponding AuthorSong, Xiaoxiao; Liu, Huafeng; Wang, Yuan
Affiliation1.Institute of Microelectronics, State Key Laboratory of Analog and Mixed-Signal VLSI, University of Macau, 999078, Macao
2.Department of Electrical Engineering-MNS, University of Leuven, Leuven, 3000, Belgium
3.School of Physics and Information Engineering, Jiangsu Second Normal University, Nanjing, 210013, China
4.MOE Key Laboratory of Fundamental Physical Quantities Measurement, PGMF and School of Physics, Huazhong University of Science and Technology, Wuhan, 430074, China
First Author AffilicationUniversity of Macau
Corresponding Author AffilicationUniversity of Macau
Recommended Citation
GB/T 7714
Zheng, Zhuoyue,Wang, Chen,Wang, Linlin,et al. Micro-Electro-Mechanical Systems Microphones: A Brief Review Emphasizing Recent Advances in Audible Spectrum Applications[J]. Micromachines, 2024, 15(3), 352.
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