Residential College | false |
Status | 已發表Published |
Micro-Electro-Mechanical Systems Microphones: A Brief Review Emphasizing Recent Advances in Audible Spectrum Applications | |
Zheng, Zhuoyue1; Wang, Chen2; Wang, Linlin2; Ji, Zeyu1; Song, Xiaoxiao3; Mak, Pui In1; Liu, Huafeng4; Wang, Yuan1 | |
Source Publication | Micromachines |
ISSN | 2072-666X |
2024-02-29 | |
Abstract | The MEMS microphone is a representative device among the MEMS family, which has attracted substantial research interest, and those tailored for human voice have earned distinct success in commercialization. Although sustained development persists, challenges such as residual stress, environmental noise, and structural innovation are posed. To collect and summarize the recent advances in this subject, this paper presents a concise review concerning the transduction mechanism, diverse mechanical structure topologies, and effective methods of noise reduction for high-performance MEMS microphones with a dynamic range akin to the audible spectrum, aiming to provide a comprehensive and adequate analysis of this scope. |
Keyword | Capacitive Microphone Directional Microphone Environmental Noise-cancelling Mems Microphone Piezoelectric Microphone |
Language | 英語English |
DOI | 10.3390/mi15030352 |
URL | View the original |
Volume | 15 |
Issue | 3 |
Pages | 352 |
WOS ID | WOS:001192768400001 |
WOS Subject | Chemistry, Analytical ; Nanoscience & Nanotechnology ; Instruments & Instrumentation ; Physics, Applied |
WOS Research Area | Chemistry ; Science & Technology - Other Topics ; Instruments & Instrumentation ; Physics |
Indexed By | SCIE |
Scopus ID | 2-s2.0-85189144322 |
Fulltext Access | |
Citation statistics | |
Document Type | Review article |
Collection | THE STATE KEY LABORATORY OF ANALOG AND MIXED-SIGNAL VLSI (UNIVERSITY OF MACAU) Faculty of Science and Technology INSTITUTE OF MICROELECTRONICS DEPARTMENT OF ELECTRICAL AND COMPUTER ENGINEERING |
Corresponding Author | Song, Xiaoxiao; Liu, Huafeng; Wang, Yuan |
Affiliation | 1.Institute of Microelectronics, State Key Laboratory of Analog and Mixed-Signal VLSI, University of Macau, 999078, Macao 2.Department of Electrical Engineering-MNS, University of Leuven, Leuven, 3000, Belgium 3.School of Physics and Information Engineering, Jiangsu Second Normal University, Nanjing, 210013, China 4.MOE Key Laboratory of Fundamental Physical Quantities Measurement, PGMF and School of Physics, Huazhong University of Science and Technology, Wuhan, 430074, China |
First Author Affilication | University of Macau |
Corresponding Author Affilication | University of Macau |
Recommended Citation GB/T 7714 | Zheng, Zhuoyue,Wang, Chen,Wang, Linlin,et al. Micro-Electro-Mechanical Systems Microphones: A Brief Review Emphasizing Recent Advances in Audible Spectrum Applications[J]. Micromachines, 2024, 15(3), 352. |
Files in This Item: | There are no files associated with this item. |
Items in the repository are protected by copyright, with all rights reserved, unless otherwise indicated.
Edit Comment