Residential College | false |
Status | 已發表Published |
Towards True In-situ Temperature Compensation Utilizing Multiple Parameter Decoupling for Resonant MEMS Sensors Subject to Blue Sideband Excitation | |
Xi, Jingqian1; Zheng, Zhuoyue2; Liu, Huafeng1; Zhang, Pan3; Zhao, Chun4; Wang, Yuan2; Wang, Chen4; Kraft, Michael5; Martins, Rui P.2; Mak, Pui In2 | |
2024-04 | |
Source Publication | IEEE Sensors Letters |
ISSN | 2475-1472 |
Volume | 8Issue:4Pages:2500804 |
Abstract | This letter conducts a thorough comparison between two temperature compensation methods for resonant micro-electro-mechanical-system (MEMS) sensors, i.e., 1) a newly proposed in-situ temperature compensation technique based on a multiple parameter decoupling (MPD) using a single resonant MEMS sensor subject to blue-sideband excitation, and 2) the prevailing method utilizing a temperature sensor, which, in this letter, is a resonant thermometer in close vicinity of the sensor. Experimental results show that the MPD-based in-situ temperature compensation method offers better noise performance, long-term stability (fourfold at 1000s integration time) and application simplicity, compared with the compensation method using an additional thermometer, affirming that the proposed subject is of considerable potential for true in-situ temperature compensation for high-precision resonant MEMS sensors. |
Keyword | Blue-sideband Excitation (Bse) Mechanical Sensors Multiple Parameter Decoupling (Mpd) Resonant Sensor Temperature Compensation |
DOI | 10.1109/LSENS.2024.3374377 |
URL | View the original |
Indexed By | ESCI |
Language | 英語English |
WOS Research Area | Engineering ; Instruments & Instrumentation ; Physics |
WOS Subject | Engineering, Electrical & Electronic ; Instruments & Instrumentation ; Physics, Applied |
WOS ID | WOS:001192365900006 |
Publisher | IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC, 445 HOES LANE, PISCATAWAY, NJ 08855-4141 |
Scopus ID | 2-s2.0-85188014617 |
Fulltext Access | |
Citation statistics | |
Document Type | Journal article |
Collection | Faculty of Science and Technology INSTITUTE OF MICROELECTRONICS DEPARTMENT OF ELECTRICAL AND COMPUTER ENGINEERING |
Corresponding Author | Zhao, Chun; Wang, Yuan |
Affiliation | 1.Huazhong University of Science and Technology, Moe Key Laboratory of Fundamental Physical Quantities Measurement, Pgmf and School of Physics, Wuhan, 430074, China 2.University of Macau, Institute of Microelectronics, Zhuhai, 999078, China 3.Peking University, National Key Laboratory of Advanced Micro and Nano Manufacture Technology, Beijing, 100871, China 4.University of York, School of Physics, Engineering and Technology, York, YO10 5DD, United Kingdom 5.University of Leuven, Department of Electrical Engineering-MNS, Leuven, 3000, Belgium |
Corresponding Author Affilication | University of Macau |
Recommended Citation GB/T 7714 | Xi, Jingqian,Zheng, Zhuoyue,Liu, Huafeng,et al. Towards True In-situ Temperature Compensation Utilizing Multiple Parameter Decoupling for Resonant MEMS Sensors Subject to Blue Sideband Excitation[J]. IEEE Sensors Letters, 2024, 8(4), 2500804. |
APA | Xi, Jingqian., Zheng, Zhuoyue., Liu, Huafeng., Zhang, Pan., Zhao, Chun., Wang, Yuan., Wang, Chen., Kraft, Michael., Martins, Rui P.., & Mak, Pui In (2024). Towards True In-situ Temperature Compensation Utilizing Multiple Parameter Decoupling for Resonant MEMS Sensors Subject to Blue Sideband Excitation. IEEE Sensors Letters, 8(4), 2500804. |
MLA | Xi, Jingqian,et al."Towards True In-situ Temperature Compensation Utilizing Multiple Parameter Decoupling for Resonant MEMS Sensors Subject to Blue Sideband Excitation".IEEE Sensors Letters 8.4(2024):2500804. |
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