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Towards True In-situ Temperature Compensation Utilizing Multiple Parameter Decoupling for Resonant MEMS Sensors Subject to Blue Sideband Excitation
Xi, Jingqian1; Zheng, Zhuoyue2; Liu, Huafeng1; Zhang, Pan3; Zhao, Chun4; Wang, Yuan2; Wang, Chen4; Kraft, Michael5; Martins, Rui P.2; Mak, Pui In2
2024-04
Source PublicationIEEE Sensors Letters
ISSN2475-1472
Volume8Issue:4Pages:2500804
Abstract

This letter conducts a thorough comparison between two temperature compensation methods for resonant micro-electro-mechanical-system (MEMS) sensors, i.e., 1) a newly proposed in-situ temperature compensation technique based on a multiple parameter decoupling (MPD) using a single resonant MEMS sensor subject to blue-sideband excitation, and 2) the prevailing method utilizing a temperature sensor, which, in this letter, is a resonant thermometer in close vicinity of the sensor. Experimental results show that the MPD-based in-situ temperature compensation method offers better noise performance, long-term stability (fourfold at 1000s integration time) and application simplicity, compared with the compensation method using an additional thermometer, affirming that the proposed subject is of considerable potential for true in-situ temperature compensation for high-precision resonant MEMS sensors.

KeywordBlue-sideband Excitation (Bse) Mechanical Sensors Multiple Parameter Decoupling (Mpd) Resonant Sensor Temperature Compensation
DOI10.1109/LSENS.2024.3374377
URLView the original
Indexed ByESCI
Language英語English
WOS Research AreaEngineering ; Instruments & Instrumentation ; Physics
WOS SubjectEngineering, Electrical & Electronic ; Instruments & Instrumentation ; Physics, Applied
WOS IDWOS:001192365900006
PublisherIEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC, 445 HOES LANE, PISCATAWAY, NJ 08855-4141
Scopus ID2-s2.0-85188014617
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Citation statistics
Document TypeJournal article
CollectionFaculty of Science and Technology
INSTITUTE OF MICROELECTRONICS
DEPARTMENT OF ELECTRICAL AND COMPUTER ENGINEERING
Corresponding AuthorZhao, Chun; Wang, Yuan
Affiliation1.Huazhong University of Science and Technology, Moe Key Laboratory of Fundamental Physical Quantities Measurement, Pgmf and School of Physics, Wuhan, 430074, China
2.University of Macau, Institute of Microelectronics, Zhuhai, 999078, China
3.Peking University, National Key Laboratory of Advanced Micro and Nano Manufacture Technology, Beijing, 100871, China
4.University of York, School of Physics, Engineering and Technology, York, YO10 5DD, United Kingdom
5.University of Leuven, Department of Electrical Engineering-MNS, Leuven, 3000, Belgium
Corresponding Author AffilicationUniversity of Macau
Recommended Citation
GB/T 7714
Xi, Jingqian,Zheng, Zhuoyue,Liu, Huafeng,et al. Towards True In-situ Temperature Compensation Utilizing Multiple Parameter Decoupling for Resonant MEMS Sensors Subject to Blue Sideband Excitation[J]. IEEE Sensors Letters, 2024, 8(4), 2500804.
APA Xi, Jingqian., Zheng, Zhuoyue., Liu, Huafeng., Zhang, Pan., Zhao, Chun., Wang, Yuan., Wang, Chen., Kraft, Michael., Martins, Rui P.., & Mak, Pui In (2024). Towards True In-situ Temperature Compensation Utilizing Multiple Parameter Decoupling for Resonant MEMS Sensors Subject to Blue Sideband Excitation. IEEE Sensors Letters, 8(4), 2500804.
MLA Xi, Jingqian,et al."Towards True In-situ Temperature Compensation Utilizing Multiple Parameter Decoupling for Resonant MEMS Sensors Subject to Blue Sideband Excitation".IEEE Sensors Letters 8.4(2024):2500804.
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