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Electronic and Optoelectronic Monolayer WSe2 Devices via Transfer-Free Fabrication Method
Wang,Zixuan1,2; Nie,Yecheng2; Ou,Haohui2; Chen,Dao2; Cen,Yingqian2; Liu,Jidong2; Wu,Di2; Hong,Guo3; Li,Benxuan2,4; Xing,Guichuan1; Zhang,Wenjing2
2023-04-14
Source PublicationNanomaterials
ISSN2079-4991
Volume13Issue:8Pages:1368
Abstract

Monolayer transition metal dichalcogenides (TMDs) have drawn significant attention for their potential applications in electronics and optoelectronics. To achieve consistent electronic properties and high device yield, uniform large monolayer crystals are crucial. In this report, we describe the growth of high-quality and uniform monolayer WSe film using chemical vapor deposition on polycrystalline Au substrates. This method allows for the fabrication of continuous large-area WSe film with large-size domains. Additionally, a novel transfer-free method is used to fabricate field-effect transistors (FETs) based on the as-grown WSe. The exceptional metal/semiconductor interfaces achieved through this fabrication method result in monolayer WSe FETs with extraordinary electrical performance comparable to those with thermal deposition electrodes, with a high mobility of up to ≈62.95 cm V s at room temperature. In addition, the as-fabricated transfer-free devices can maintain their original performance after weeks without obvious device decay. The transfer-free WSe-based photodetectors exhibit prominent photoresponse with a high photoresponsivity of ~1.7 × 10 A W at V = 1 V and V = −60 V and a maximum detectivity value of ~1.2 × 10 Jones. Our study presents a robust pathway for the growth of high-quality monolayer TMDs thin films and large-scale device fabrication.

KeywordChemical Vapor Deposition Monolayer Wse2 Photodetector Transfer-free Transistor
DOI10.3390/nano13081368
URLView the original
Indexed BySCIE
Language英語English
WOS Research AreaChemistryscience & Technology - Other Topics ; Materials Science ; Physics
WOS SubjectChemistry, Multidisciplinary ; Nanoscience & Nanotechnology ; Materials Science, Multidisciplinary ; Physics, Applied
WOS IDWOS:000979419800001
PublisherMDPI, ST ALBAN-ANLAGE 66, CH-4052 BASEL, SWITZERLAND
Scopus ID2-s2.0-85153948365
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Citation statistics
Document TypeJournal article
CollectionINSTITUTE OF APPLIED PHYSICS AND MATERIALS ENGINEERING
Corresponding AuthorHong,Guo; Li,Benxuan; Xing,Guichuan; Zhang,Wenjing
Affiliation1.Joint Key Laboratory of the Ministry of Education,Institute of Applied Physics and Materials Engineering,University of Macau,Taipa,Avenida da Universidade,999078,Macao
2.International Collaborative Laboratory of 2D Materials for Optoelectronics Science and Technology of Ministry of Education,Institute of Microscale Optoelectronics,Shenzhen University,Shenzhen,518060,China
3.Department of Materials Science and Engineering & Center of Super-Diamond and Advanced Films,College of Engineering,City University of Hong Kong,Kowloon,83 Tat Chee Avenue,999077,Hong Kong
4.Electrical Engineering Division,Engineering Department,University of Cambridge,Cambridge,9 JJ Thomson Avenue,CB3 0FA,United Kingdom
First Author AffilicationINSTITUTE OF APPLIED PHYSICS AND MATERIALS ENGINEERING
Corresponding Author AffilicationINSTITUTE OF APPLIED PHYSICS AND MATERIALS ENGINEERING
Recommended Citation
GB/T 7714
Wang,Zixuan,Nie,Yecheng,Ou,Haohui,et al. Electronic and Optoelectronic Monolayer WSe2 Devices via Transfer-Free Fabrication Method[J]. Nanomaterials, 2023, 13(8), 1368.
APA Wang,Zixuan., Nie,Yecheng., Ou,Haohui., Chen,Dao., Cen,Yingqian., Liu,Jidong., Wu,Di., Hong,Guo., Li,Benxuan., Xing,Guichuan., & Zhang,Wenjing (2023). Electronic and Optoelectronic Monolayer WSe2 Devices via Transfer-Free Fabrication Method. Nanomaterials, 13(8), 1368.
MLA Wang,Zixuan,et al."Electronic and Optoelectronic Monolayer WSe2 Devices via Transfer-Free Fabrication Method".Nanomaterials 13.8(2023):1368.
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