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Band alignment and electrical properties of NiO/β-Ga2O3 heterojunctions with different β-Ga2O3 orientations
Deng, Yuxin1; Yang, Ziqi2; Xu, Tongling1; Jiang, Huaxing2; Ng, Kar Wei3; Liao, Chao1; Su, Danni1; Pei, Yanli1; Chen, Zimin1; Wang, Gang1; Lu, Xing1
2023-03-04
Source PublicationApplied Surface Science
ISSN0169-4332
Volume622Pages:156917
Abstract

Due to the difficulty of p-type doping in β-GaO, NiO/β-GaO heterojunction becomes a promising candidate for fabricating bipolar devices. In this work, we performed a comparative study on the band alignment and electrical properties of the NiO/β-GaO heterojunctions with different β-GaO orientations. NiO thin films were sputtered on three β-GaO substrates with (−2 0 1), (0 0 1) and (0 1 0) orientations and were subsequently fabricated into NiO/β-GaO heterojunction diodes. A type-Ⅱ band alignment between the NiO and β-GaO was identified by the transmittance spectra and X-ray photoelectron spectroscopy (XPS) measurements. The valence band offsets (VBOs) of the NiO/β-GaO heterojunctions on (−2 0 1), (0 0 1) and (0 1 0) substrates were determined to be (2.12 ± 0.06) eV, (2.44 ± 0.07) eV and (2.66 ± 0.07) eV, respectively, and their corresponding conduction band offsets (CBOs) were (1.22 ± 0.06) eV, (1.49 ± 0.07) eV and (1.86 ± 0.07) eV. In addition, the fabricated heterojunction diodes showed good rectification properties with different turn-on voltages, which was in good agreement with the XPS results. The revealed influence of substrate orientations on the properties in NiO/β-GaO heterojunctions were of great importance for the design and optimization of β-GaO-based heterojunction devices.

KeywordBand Alignment Gallium Oxide Nickel Oxide Pn Heterojunction
DOI10.1016/j.apsusc.2023.156917
URLView the original
Indexed BySCIE
Language英語English
WOS Research AreaChemistry ; Materials Science ; Physics
WOS SubjectChemistry, Physical ; Materials Science, Coatings & Films ; Physics, Applied ; Physics, Condensed Matter
WOS IDWOS:000950378900001
PublisherELSEVIER, RADARWEG 29, 1043 NX AMSTERDAM, NETHERLANDS
Scopus ID2-s2.0-85150807981
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Citation statistics
Document TypeJournal article
CollectionINSTITUTE OF APPLIED PHYSICS AND MATERIALS ENGINEERING
University of Macau
Corresponding AuthorLu, Xing
Affiliation1.State Key Laboratory of Optoelectronic Materials and Technologies, School of Electronics and Information Technology, Sun Yat-sen University, Guangzhou, 510275, China
2.School of Microelectronics, South China University of Technology, Guangzhou, 510641, China
3.Institute of Applied Physics and Materials Engineering, University of Macau, Taipa, Macao
Recommended Citation
GB/T 7714
Deng, Yuxin,Yang, Ziqi,Xu, Tongling,et al. Band alignment and electrical properties of NiO/β-Ga2O3 heterojunctions with different β-Ga2O3 orientations[J]. Applied Surface Science, 2023, 622, 156917.
APA Deng, Yuxin., Yang, Ziqi., Xu, Tongling., Jiang, Huaxing., Ng, Kar Wei., Liao, Chao., Su, Danni., Pei, Yanli., Chen, Zimin., Wang, Gang., & Lu, Xing (2023). Band alignment and electrical properties of NiO/β-Ga2O3 heterojunctions with different β-Ga2O3 orientations. Applied Surface Science, 622, 156917.
MLA Deng, Yuxin,et al."Band alignment and electrical properties of NiO/β-Ga2O3 heterojunctions with different β-Ga2O3 orientations".Applied Surface Science 622(2023):156917.
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