Experimental Measurement of the Impressed Electric Field in a Mutlipolar Electron Cyclotron Resonance Plasma Source

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	Experimental Measurement of the Impressed Electric Field in a Mutlipolar Electron Cyclotron Resonance Plasma Source
	Mak, P. U.; Asmussen, J.
	1995-10-01
Source Publication	Proc. of 1995 IEEE International Conference on Plasma Science
Abstract	It is well-known that microwave sources exhibit complex. nonlinear output behavior versus many independent input variables. For example, the output plasma density can vary by over an order of magnitude as the independent input variables, such as microwave power, pressure, gas flow rate and microwave reactor matching a~ only slightly changed. In addition, these output variations exhibit hysteresis and multiple steady-statesl’l, which are dependent in poorly-understood ways upon the many different independently controllable input variables. An understanding of this nonlinear inpur/output behavior is essential for optimum plasma source design and also is required for developing automatic reactor control strategies. Thus this paper will describe the detailed experimental measurement of the relationships between the input variables, the internal variables and the output variables of a multipolar electron cyclotron resonance (ECR) plasma source.
Keyword	Impressed electric field ECR plasma source
Language	英語English
The Source to Article	PB_Publication
PUB ID	40267
Document Type	Conference paper
Collection	DEPARTMENT OF ELECTRICAL AND COMPUTER ENGINEERING
Corresponding Author	Mak, P. U.
Recommended Citation GB/T 7714	Mak, P. U.,Asmussen, J.. Experimental Measurement of the Impressed Electric Field in a Mutlipolar Electron Cyclotron Resonance Plasma Source[C], 1995.
APA	Mak, P. U.., & Asmussen, J. (1995). Experimental Measurement of the Impressed Electric Field in a Mutlipolar Electron Cyclotron Resonance Plasma Source. Proc. of 1995 IEEE International Conference on Plasma Science.

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